PROBLEM TO BE SOLVED: To facilitate and accelerate the adjustment work of the light quantity of interfering light received, in an optical image measuring device.

SOLUTION: A main control unit 211 controls a fiber-end driving mechanism 140 and an attenuator 121, while referring to the light quantity received of an interfering light LC, and alternately executes actions (1), (2): (1) an emission end 116 is moved so that the light quantity received is increased to at least an upper limit value; (2) a light quantity of reference light LR is changed so that the light quantity received is decreased to at least a lower limit value. When the light quantity received predetermined by a received light quantity specifying unit 212 is reduced, corresponding to the movement of the emission end 116 in the action (1), the main control part 211 controls the fiber-end driving mechanism 140, to thereby return a relative position to a state immediately prior to the change this time. Subsequently, by having the main control unit 211 control the attenuator 121 and change the light quantity of the interference light LC, the light quantity of interference light LC received by a CCD image sensor 120 is led to a target value.

COPYRIGHT: (C)2011,JPO&INPIT

【課題】光画像計測装置における干渉光の受光量の調整作業の容易化と迅速化を図る。
【解決手段】主制御部２１１は、干渉光ＬＣの受光量を参照しつつファイバ端駆動機構１４０及びアッテネータ１２１を制御して、次の動作（１）、（２）を交互に実行させる：（１）少なくとも上限値まで受光量を増加させるように出射端１１６を移動する；（２）少なくとも下限値まで受光量を減少させるように、参照光ＬＲの光量を変更する。（１）における出射端１１６の移動に対応して受光量特定部２１２により特定される受光量が減少すると、主制御部２１１は、ファイバ端駆動機構１４０を制御して、今回の変更の直前の状態に相対位置を戻す。続いて、主制御部２１１は、アッテネータ１２１を制御して干渉光ＬＣの光量を変更することで、ＣＣＤイメージセンサ１２０による干渉光ＬＣの受光量を目標値に導く。
【選択図】図５