| H | ELECTRICITY |
| 01 | BASIC ELECTRIC ELEMENTS |
| L | SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR |
| 21 | Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof |
| 02 | Manufacture or treatment of semiconductor devices or of parts thereof |
| 04 | the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer |
| 18 | the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials |
| 30 | Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 |
| 302 | to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting |
| 304 | Mechanical treatment, e.g. grinding, polishing, cutting |
| 3043 | Making grooves, e.g. cutting |