(EN) PROBLEM TO BE SOLVED: To provide an apparatus for producing silicon capable of improving the efficiency of a reduction reaction so as to improve the yield of silicon and improving the separation recovery efficiency of the produced silicon and the produced gas as well, without causing complication in equipment configurations.
SOLUTION: The apparatus for producing silicon is equipped with a zinc feed pipe which communicates a silicon compound gas to a reaction vessel 10 and supplies zinc gas from a first zinc supply port 40a into the reaction vessel in ejecting to a second ejecting direction, a flow straightening member 20 which is installed in the reaction vessel and allows the silicon compound gas ejected from a silicon compound supply port in the first ejecting direction to flow from the upstream side to the downstream side in the reaction vessel while the zinc gas ejected from the first zinc supply port to the second zinc supply port is deviated, and a discharge pipe 10b which is installed at the downstream side of the flow straightening member in the reaction vessel and discharges a reaction product gas containing silicon outside the reaction vessel.
COPYRIGHT: (C)2009,JPO&INPIT
(JA) 【課題】装置構成の複雑化を排しながら、シリコンの収率を向上させるための還元反応の効率を向上し、同時に生成シリコンと生成ガスとの分離回収効率をも向上することのできるシリコン製造装置を提供する。
【解決手段】珪素化合物ガスを反応容器10に連絡し、亜鉛ガスを、第1の亜鉛供給口40aから反応容器内に第2の吐出方向に吐出しながら供給する亜鉛供給管と、反応容器内に設けられ、第1の亜鉛供給口から第2の吐出方向に吐出される亜鉛ガスを偏向しながら、珪素化合物供給口から第1の吐出方向に吐出される珪素化合物ガスが反応容器における上流側から下流側に向かって流れることを許容する整流部材20と、反応容器において整流部材の下流側に設けられ、シリコンを含む反応生成ガスを反応容器外に排出する排出管10bと、を備える。
【選択図】図1