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1. EP2216294 - APPARATUS AND PROCESS FOR THE PRODUCTION OF SILICON

官庁 欧州特許庁(EPO)
出願番号 08841622
出願日 20.10.2008
公開番号 2216294
公開日 11.08.2010
公報種別 A1
IPC
C01B 33/033
C化学;冶金
01無機化学
B非金属元素;その化合物
33けい素;その化合物
02けい素
021製造
027シリカまたはシリカ含有材料以外の気体状または気化されたけい素化合物の分解または還元によるもの
033金属または合金のみを還元剤とする,けい素ハロゲン化物またはハロシランの還元によるもの
CPC
C01B 33/033
CCHEMISTRY; METALLURGY
01INORGANIC CHEMISTRY
BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; ; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
33Silicon; Compounds thereof
02Silicon
021Preparation
027by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
033by reduction of silicon halides or halosilanes with a metal or a metallic alloy as the only reducing agents
B01J 4/002
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
4Feed ; or outlet; devices; Feed or outlet control devices
001Feed or outlet devices as such, e.g. feeding tubes
002Nozzle-type elements
B01J 12/005
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
12Chemical processes in general for reacting gaseous media with gaseous media; Apparatus specially adapted therefor
005carried out at high temperatures, e.g. by pyrolysis
B01J 19/24
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
19Chemical, physical or physico-chemical processes in general; Their relevant apparatus
24Stationary reactors without moving elements inside
B01J 2219/00132
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
2219Chemical, physical or physico-chemical processes in general; Their relevant apparatus
00049Controlling or regulating processes
00051Controlling the temperature
00132using electric heating or cooling elements
B01J 2219/185
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
2219Chemical, physical or physico-chemical processes in general; Their relevant apparatus
18Details relating to the spatial orientation of the reactor
185vertical
出願人 KINOTECH SOLAR ENERGY CORP
発明者 TAKEUCHI YOSHINORI
SAKAKI DAISUKE
OHASHI TADASHI
MATSUMURA HISASHI
指定国 (国コード)
発明の名称
(DE) VORRICHTUNG UND VERFAHREN ZUR HERSTELLUNG VON SILICIUM
(EN) APPARATUS AND PROCESS FOR THE PRODUCTION OF SILICON
(FR) APPAREIL ET PROCÉDÉ DE PRODUCTION DU SILICIUM
要約
(EN)
A silicon manufacturing apparatus is disclosed as having a reactor tube (10) in which reaction occurs between zinc and silicon compound, zinc supply pipes (30, 30') having heating portions to heat zinc for generating zinc gas and zinc ejecting portions ejecting and supplying zinc gas to the reactor tube, a zinc feeding section (40A, 40B) feeding zinc into the zinc supply pipes, a silicon compound supply pipe (50, 50A, 50B, 50C, 50c, 54, 57, 90) having a silicon compound ejecting portion to eject and supply silicon compound gas to the reactor tube so as to allow silicon compound gas to flow from a lower side to an upper side in the reactor tube, and a heating furnace (20) disposed outside the reactor tube to define a heating region (a) accommodating therein a part of the reactor tube, the heating portion and the zinc ejecting section for heating the same so as to allow the reactor tube, through which zinc gas and silicon compound gas flow, to have the temperature distribution such that a temperature closer to a central axis (C) of the reactor tube is lower than that closer to a side circumferential wall of the reactor tube.