(EN) The invention provides a state determination device, a state determination method, and a computer-readable recording medium for determining the state of a drive mechanism configured so as to operate while holding a substrate in a substrate processing device. The state determination device is equipped with: an acquisition unit configured so as to acquire operational data for the drive mechanism; a model generation unit configured so as to generate a monitoring model for the drive mechanism by executing machine learning using an autoencoder on the basis of normal operational data that is derived from operational data acquired by the acquisition unit when the drive mechanism is operating normally; and a first determination unit configured so as to determine the state of the drive mechanism on the basis of first output data obtained by inputting, to the monitoring model, evaluation data that is derived from operational data obtained by the acquisition unit when the drive mechanism is being evaluated.
(ZH) 本发明提供状态判断装置、状态判断方法和计算机可读取的存储介质，判断构成为能够在基片处理装置中保持基片并且使之动作的驱动机构的状态。该状态判断装置包括：构成为能够获取驱动机构的动作数据的获取部；模型生成部，其构成为能够基于正常动作数据，执行使用自动编码器的机器学习，来生成驱动机构的监视模型，其中，正常动作数据来自于在驱动机构的正常动作时由获取部获取到的动作数据；和第一判断部，其构成为能够基于将评价数据输入监视模型而得到的第一输出数据，判断驱动机构的状态，其中，评价数据来自于在驱动机构的评价时由获取部获取到的动作数据。
