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1. CN113614664 - State determination device, state determination method, and computer-readable recording medium

官庁
中華人民共和国
出願番号 202080021847.1
出願日 18.03.2020
公開番号 113614664
公開日 05.11.2021
公報種別 A
IPC
G05B 23/02
G物理学
05制御;調整
B制御系または調整系一般;このような系の機能要素;このような系または要素の監視または試験装置
23制御系またはその一部の試験または監視
02電気式試験または監視
H01L 21/677
H電気
01基本的電気素子
L半導体装置,他に属さない電気的固体装置
21半導体装置または固体装置またはそれらの部品の製造または処理に特に適用される方法または装置
67製造または処理中の半導体または電気的固体装置の取扱いに特に適用される装置;半導体または電気的固体装置もしくは構成部品の製造または処理中のウエハの取扱いに特に適用される装置
677移送のためのもの,例.異なるワ―クステーション間での移送
CPC
H01L 21/677
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
677for conveying, e.g. between different workstations
G05B 23/02
GPHYSICS
05CONTROLLING; REGULATING
BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
23Testing or monitoring of control systems or parts thereof
02Electric testing or monitoring
G01L 5/00
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
5Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
G05B 19/4155
GPHYSICS
05CONTROLLING; REGULATING
BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
19Programme-control systems
02electric
18Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
4155characterised by programme execution, i.e. part programme or machine function execution, e.g. selection of a programme
G05B 2219/45031
GPHYSICS
05CONTROLLING; REGULATING
BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
2219Program-control systems
30Nc systems
45Nc applications
45031Manufacturing semiconductor wafers
H01L 21/67276
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
67005Apparatus not specifically provided for elsewhere
67242Apparatus for monitoring, sorting or marking
67276Production flow monitoring, e.g. for increasing throughput
出願人 TOKYO ELECTRON LTD.
东京毅力科创株式会社
発明者 MAKI JUNNOSUKE
牧准之辅
TOYONAGA MASAOMI
丰永真臣
OHTA ATSUSHI
太田敦
OKADA MOTOI
冈田基
TSUTSUI TAKURO
筒井拓郎
SANO KEI
佐野圭
YANO MITSUTERU
矢野光辉
代理人 北京尚诚知识产权代理有限公司 11322
北京尚诚知识产权代理有限公司 11322
優先権情報 2019-058391 26.03.2019 JP
発明の名称
(EN) State determination device, state determination method, and computer-readable recording medium
(ZH) 状态判断装置、状态判断方法和计算机可读取的存储介质
要約
(EN) The invention provides a state determination device, a state determination method, and a computer-readable recording medium for determining the state of a drive mechanism configured so as to operate while holding a substrate in a substrate processing device. The state determination device is equipped with: an acquisition unit configured so as to acquire operational data for the drive mechanism; a model generation unit configured so as to generate a monitoring model for the drive mechanism by executing machine learning using an autoencoder on the basis of normal operational data that is derived from operational data acquired by the acquisition unit when the drive mechanism is operating normally; and a first determination unit configured so as to determine the state of the drive mechanism on the basis of first output data obtained by inputting, to the monitoring model, evaluation data that is derived from operational data obtained by the acquisition unit when the drive mechanism is being evaluated.
(ZH) 本发明提供状态判断装置、状态判断方法和计算机可读取的存储介质,判断构成为能够在基片处理装置中保持基片并且使之动作的驱动机构的状态。该状态判断装置包括:构成为能够获取驱动机构的动作数据的获取部;模型生成部,其构成为能够基于正常动作数据,执行使用自动编码器的机器学习,来生成驱动机构的监视模型,其中,正常动作数据来自于在驱动机构的正常动作时由获取部获取到的动作数据;和第一判断部,其构成为能够基于将评价数据输入监视模型而得到的第一输出数据,判断驱动机构的状态,其中,评价数据来自于在驱动机构的评价时由获取部获取到的动作数据。