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1. CN107110643 - Three-dimensional measurement device

官庁
中華人民共和国
出願番号 201680003486.1
出願日 08.01.2016
公開番号 107110643
公開日 29.08.2017
特許番号 107110643
特許付与日 07.04.2020
公報種別 B
IPC
G01B 11/25
G物理学
01測定;試験
B長さ,厚さまたは同種の直線寸法の測定;角度の測定;面積の測定;表面または輪郭の不規則性の測定
11光学的手段の使用によって特徴づけられた測定装置
24輪郭または曲率の測定用
25対象物にパターン,例.モアレ縞,を投影することによるもの
G06T 1/00
G物理学
06計算;計数
Tイメージデータ処理または発生一般
1汎用イメージデータ処理
CPC
G01B 11/25
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
24for measuring contours or curvatures
25by projecting a pattern, e.g. ; one or more lines,; moiré fringes on the object
H04N 7/183
HELECTRICITY
04ELECTRIC COMMUNICATION TECHNIQUE
NPICTORIAL COMMUNICATION, e.g. TELEVISION
7Television systems
18Closed circuit television systems, i.e. systems in which the signal is not broadcast
183for receiving images from a single remote source
G01B 11/0608
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
02for measuring length, width or thickness
06for measuring thickness ; ; e.g. of sheet material
0608Height gauges
G01B 11/2513
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
24for measuring contours or curvatures
25by projecting a pattern, e.g. ; one or more lines,; moiré fringes on the object
2513with several lines being projected in more than one direction, e.g. grids, patterns
H04N 5/2256
HELECTRICITY
04ELECTRIC COMMUNICATION TECHNIQUE
NPICTORIAL COMMUNICATION, e.g. TELEVISION
5Details of television systems
222Studio circuitry; Studio devices; Studio equipment ; ; Cameras comprising an electronic image sensor, e.g. digital cameras, video cameras, TV cameras, video cameras, camcorders, webcams, camera modules for embedding in other devices, e.g. mobile phones, computers or vehicles
225Television cameras ; ; Cameras comprising an electronic image sensor, e.g. digital cameras, video cameras, camcorders, webcams, camera modules specially adapted for being embedded in other devices, e.g. mobile phones, computers or vehicles
2256provided with illuminating means
出願人 CKD CORP
CKD株式会社
発明者 OHYAMA TSUYOSHI
大山刚
SAKAIDA NORIHIKO
坂井田宪彦
MAMIYA TAKAHIRO
间宫高弘
ISHIGAKI HIROYUKI
石垣裕之
代理人 北京东方亿思知识产权代理有限责任公司 11258
優先権情報 2015118842 12.06.2015 JP
発明の名称
(EN) Three-dimensional measurement device
(ZH) 三维测量装置
要約
(EN) The present invention provides a three-dimensional measurement device capable of carrying out three-dimensional measurement using a phase shift method with higher accuracy and in a shorter period of time. A substrate inspection device 1 is provided with an illumination device 4 for irradiating a striped light pattern onto a printed circuit board 2, a camera 5 for imaging the portion of the printed circuit board 2 irradiated with the light pattern, and a control device 6 for carrying out three-dimensional measurement on the basis of the imaged image data. The control device 6 calculates a first height measurement value on the basis of image data obtained by irradiating a first optical pattern having a first period onto a first position and acquires gain and offset values from the image data. Further, the control device 6 uses the gain and offset values to calculate a second height measurement value on the basis of image data obtained by irradiating a second optical pattern having a second period onto a second position that is diagonally offset by a half-pixel pitch. Height data specified on the basis of the first measurement value and second measurement value is acquired as real height data.
(ZH) 提供一种在利用相移法进行三维测量时能够在更短时间内实现更高精度的测量的三维测量装置。基板检查装置(1)具备:照明装置(4),对印刷基板(2)照射条纹状的光图案;相机(5),拍摄在印刷基板(2)上照射光图案的部分;控制装置(6),基于所拍摄的图像数据进行三维测量。控制装置(6)基于在第一位置照射第一周期的第一光图案所获得的图像数据来计算第一高度测量值,并从该图像数据取得增益和偏移的值。另外,基于在斜移半个像素间距的第二位置照射第二周期的第二光图案所获得的图像数据并利用所述增益和偏移的值来计算第二高度测量值。并且,将由第一测量值和第二测量值确定的高度数据作为真实的数据来获取。