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1. WO2020115577 - CROISSANCE EN UNE ÉTAPE D'OXYDE DE GRAPHÈNE RÉDUIT SUR DES SUBSTRATS ARBITRAIRES

Note: Texte fondé sur des processus automatiques de reconnaissance optique de caractères. Seule la version PDF a une valeur juridique

[ EN ]

WHAT IS CLAIMED IS:

1. A method for forming a cellulose acetate based reduced graphene oxide (CA-rGO) layer, the method comprising:

selecting (1200) a substrate (302);

spin-coating (1204) a cellulose acetate dispersion on the substrate (302) to obtain a cellulose acetate layer (304); and

applying (1208) a given temperature profile to the cellulose acetate layer (304) to transform it into the CA-rGO layer (306).

2. The method of Claim 1 , wherein a thickness of the cellulose acetate layer is 2 mpi or less.

3. The method of Claim 1 , wherein a thickness of the CA-rGO layer is 40 nm or less.

4. The method of Claim 1 , wherein the cellulose acetate dispersion is in acetone.

5. The method of Claim 1 , wherein the given temperature profile is applied in an insulated tube for chemical vapor deposition.

6. The method of Claim 5, wherein a pressure inside the insulated tube is less than 20 torr.

7. The method of Claim 5, further comprising:

introducing atoms of hydrogen in the insulated tube while applying the given temperature profile.

8. The method of Claim 7, further comprising:

introducing atoms of Ar in the insulated tube while applying the given temperature profile.

9. The method of Claim 8, further comprising:

introducing metallic atoms in the insulated tube for doping the CA-rGO layer.

10. The method of Claim 9, further comprising:

forming a transistor that has a drain and/or source as the CA-rGO layer.

11. The method of Claim 1 , further comprising:

forming on the substrate plural electrodes; and

forming the CA-rGO layer on top of the plural electrodes to obtain a sensor.

12. The method of Claim 11 , wherein the sensor is a humidity sensor.

13. The method of Claim 11 , wherein the sensor is a photodetector.

14. A sensor (900) for measuring a physical parameter, the sensor (900) comprising:

a substrate (902);

plural electrodes (903A, 903B) formed on the substrate (902); and a cellulose acetate derived reduced graphene oxide (CA-rGO) layer formed over the plural electrodes,

wherein the CA-rGO layer and the plural electrodes are treated by chemical vapor deposition at a temperature of at least 600 °C.

15. The sensor of Claim 14, wherein a thickness of the CA-rGO layer is 40 nm or less.

16. The sensor of Claim 14, wherein the plural electrodes are interdigitated.

17. The sensor of Claim 14, wherein the physical parameter is light intensity.

18. The sensor of Claim 14, wherein the physical parameter is humidity.

19. A method for forming a cellulose acetate based reduced graphene oxide (CA-rGO) device, the method comprising:

selecting (1200) a substrate (302);

forming (1202) plural electrodes (903A, 903B) on the substrate;

depositing (1204) a cellulose acetate dispersion on the plural electrodes (903A, 903B) to obtain a cellulose acetate layer (304);

placing (1206) the substrate (302) and the cellulose acetate layer (304) in a chemical vapor deposition system (300); and

applying (1208) a given temperature profile to the cellulose acetate layer (304) to transform it into the CA-rGO layer (306).

20. The method of Claim 19, wherein a thickness of the CA-rGO layer is 40 nm or less, the cellulose acetate dispersion is in acetone, and atoms of hydrogen and Ar are introduced in the chemical vapor deposition system while the CA-rGO layer is formed.