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1. WO2020112372 - COMMANDE DE GAINE DYNAMIQUE AVEC LEVÉE D'ANNEAU DE BORD

Note: Texte fondé sur des processus automatiques de reconnaissance optique de caractères. Seule la version PDF a une valeur juridique

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CLAIMS

What is claimed is:

1. A pedestal assembly comprising

a pedestal for supporting a substrate, the pedestal having a central shaft that positions the pedestal at a height during operation;

a ring configured for placement along a periphery of the pedestal; and

a ring adjuster subassembly including,

an adjuster flange disposed around a middle section of the central shaft; a sleeve connected to the adjuster flange and extending from the adjuster flange to an adjuster plate disposed under the pedestal;

a plurality of ring adjuster pins connected to the adjuster plate and extending vertically from the adjuster plate, each of the plurality of ring adjuster pins at a corresponding location on the adjuster plate that is adjacent to and outside of a diameter of the pedestal, and the plurality of ring adjuster pins configured for contacting an edge undersurface of the ring, the adjuster flange being coupled to at least three adjuster actuators for defining an elevation and tilt of the ring relative to a top surface of the pedestal.

2. The pedestal assembly of claim 1, wherein the sleeve comprises:

a cylindrical portion connected to the adjuster flange; and

a funnel connected to the cylinder portion and to the adjuster plate.

3. The pedestal assembly of claim 2, wherein the cylindrical portion is adjacent to the central shaft.

4. The pedestal assembly of claim 1, wherein the pedestal includes:

a central top surface extending from a central axis of the pedestal to a central top surface diameter; and

an annular surface extending from the central top surface diameter to an outer diameter of the annular surface, the annular surface being at a step down from the central top surface,

wherein the central shaft extends from the central axis to a shaft diameter, the central shaft configured for vertical movement which is translated to the pedestal,

wherein the ring is positioned adjacent to the annular surface and extends beyond the diameter of the pedestal at least at a plurality of radial extensions of the ring.

5. The pedestal assembly of claim 1, wherein the ring comprises a carrier ring including a plurality of tabs extending to a maximum outer diameter of the carrier ring, each tab in alignment with a corresponding ring adjuster pin.

6. The pad of claim 1, wherein the ring comprises a focus ring having a uniform outer diameter.

7. The pedestal assembly of claim 1, wherein adjustor actuators are connected to the adjuster flange in alignment with contact points spaced radially equidistant from each other around a horizontal plane.

8. The pedestal assembly of claim 7,

wherein the adjuster plate includes a plurality of arms corresponding to the contact points, wherein the plurality of ring adjuster pins are connected to ends of the plurality of arms.

9. The pedestal assembly of claim 7, wherein vertical movement of a corresponding contact point on the adjuster flange is translated to a corresponding adjuster pin through the sleeve and adjuster plate.

10. The pedestal assembly of claim 1, further comprising:

a plurality of hard stops located on the adjuster plate and configured to limit the upward vertical movement of the adjuster plate relative to the pedestal.

11. A pedestal assembly comprising

a pedestal for supporting a substrate, the pedestal having a central shaft that positions the pedestal at a height during operation;

a ring configured for placement along a periphery of the pedestal; and

a ring adjuster subassembly including,

a lower flange disposed around a lower section of the central shaft, and configured to maintain a vacuum within the central shaft;

a lower bellows connected to the lower flange;

an adjuster flange connected to the lower bellows and disposed around a middle section of the central shaft;

a sleeve connected to the adjuster flange and extending from the adjuster flange to an adjuster plate disposed under the pedestal;

an upper bellows connected to the adjuster flange;

an upper flange connected to the upper bellows; and

a plurality of ring adjuster pins connected to the adjuster plate and extending vertically from the adjuster plate, each of the plurality of ring adjuster pins at a corresponding location on the adjuster plate that is adjacent to and outside of a diameter of the pedestal, and the plurality of ring adjuster pins configured for contacting an edge undersurface of the ring, the adjuster flange being coupled to at least three adjuster actuators for defining an elevation and tilt of the ring relative to a top surface of the pedestal.

12. The pedestal assembly of claim 11, wherein the sleeve comprises:

a cylindrical portion connected to the adjuster flange; and

a funnel connected to the cylinder portion and to the adjuster plate.

13. The pedestal assembly of claim 11, wherein the pedestal includes:

a central top surface extending from a central axis of the pedestal to a central top surface diameter; and

an annular surface extending from the central top surface diameter to an outer diameter of the annular surface, the annular surface being at a step down from the central top surface,

wherein the central shaft extends from the central axis to a shaft diameter, the central shaft configured for vertical movement which is translated to the pedestal,

wherein the ring is positioned adjacent to the annular surface and extends beyond the diameter of the pedestal at least at a plurality of radial extensions of the ring.

14. The pedestal assembly of claim 11, wherein the ring comprises a carrier ring including a plurality of tabs extending to an outer diameter of the ring, each tab in alignment with a

corresponding ring adjuster pin.

15. The pedestal assembly of claim 1, wherein the ring comprises a focus ring having a uniform outer diameter.

16. The pedestal assembly of claim 11, wherein the adjustor actuators are connected to the adjuster flange in alignment with contact points of the adjuster flange, the contact points being spaced radially equidistant from each other around a horizontal plane.

17. A pedestal assembly comprising

a pedestal for supporting a substrate, the pedestal having a central shaft that positions the pedestal at a height during operation;

a ring configured for placement along a periphery of the pedestal and extending beyond an outer diameter of the pedestal at a plurality of arms; and

a ring adjuster subassembly including,

an adjuster flange disposed around a middle section of the central shaft; a sleeve connected to the adjuster flange and extending from the adjuster flange to an adjuster plate disposed under the pedestal, the sleeve configured for independent vertical movement relative to the central shaft at a plurality of contact points, the plurality of contact points aligned with the plurality of arms;

a plurality of ring adjuster pins connected to the adjuster plate and extending vertically from the adjuster plate, each of the plurality of ring adjuster pins at a corresponding location on a corresponding arm of the adjuster plate that is adjacent to and outside of a diameter of the pedestal, and the plurality of ring adjuster pins configured for contacting an edge undersurface of the ring, the adjuster flange being coupled to at least three adjuster actuators in alignment with the plurality of contact points for defining an elevation and tilt of the ring relative to a top surface of the pedestal.

18. The pedestal assembly of claim 17, wherein the sleeve comprises:

a cylindrical portion connected to the adjuster flange; and

a funnel connected to the cylinder portion and to the adjuster plate.

19. The pedestal assembly of claim 17, wherein the pedestal includes:

a central top surface extending from a central axis of the pedestal to a central top surface diameter; and

an annular surface extending from the central top surface diameter to an outer diameter of the annular surface, the annular surface being at a step down from the central top surface,

wherein the central shaft extends from the central axis to a shaft diameter, the central shaft configured for vertical movement which is translated to the pedestal,

wherein the ring is positioned adjacent to the annular surface and extends beyond the diameter of the pedestal at least at a plurality of radial extensions of the ring.

20. The pedestal assembly of claim 17, wherein the ring comprises a carrier ring or focus ring.