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1. WO2020112125 - COUVERCLE DE CREUSET POUR REVÊTEMENT AVEC UNE SOURCE DE FAISCEAU D'ÉLECTRONS

Note: Texte fondé sur des processus automatiques de reconnaissance optique de caractères. Seule la version PDF a une valeur juridique

[ EN ]

What is claimed is:

1 . A crucible cover for a multiple pocket vapor source that produces vapor by an electron beam directed to uncovered crucible pockets, the cover comprising: a cover body having a covering surface, a cover opening and a cover opening edge along the cover opening, the covering surface facing a crucible having a crucible surface with a plurality of pockets formed therein for holding coating materials to be evaporated where the pockets are covered or uncovered by automatically lifting the crucible cover, rotating the crucible and lowering the crucible cover to thereby align one of the plurality of pockets with the cover opening; and a cover insert has an insert bottom surface and an open area that

coincides with the cover opening wherein the cover insert is removably coupled to the cover body wherein the insert bottom surface extends below the covering surface, the cover insert connected along the edge of the cover opening wherein the cover insert becomes partially decoupled from the cover body when the cover body is lowered relative to the crucible and the cover insert contacts the crucible..

2. The crucible cover of claim 1 wherein the cover insert has structural features isolating each pocket from an adjacent pocket by contact between the cover insert and the crucible including isolating the uncovered pocket from the covered pockets.

3. The crucible cover of claim 1 wherein the cover insert has an insert body that is V-shaped with an inside edge, an outside edge and a top surface.

4. The crucible cover of claim 3 wherein the top surface is tapered in thickness from the outside edge to the inside edge.

5. The crucible cover of claim 1 wherein the insert bottom surface of the cover insert has raised bottom portions having an insert bottom contact surface wherein the insert bottom contact surface is recessed a predefined distance from the inside edge.

6. The crucible cover of claim 1 wherein the insert bottom surface of the cover insert is recessed back away from the outside surface forming a ledge.

7. The crucible cover of claim 1 wherein the cover opening has a recess along the cover opening edge forming a cover body ledge that coincides with the cover insert ledge to matingly couple and partially decouple with the cover insert.

8. The crucible cover of claim 1 wherein the covering surface of the cover body has structural features that are capable of mating contact with corresponding structural features of the crucible further isolating each pocket from an adjacent pocket by contact between the covering surface and the crucible including isolating the uncovered pocket from the covered pockets.

9. A covered, multiple pocket vapor source assembly wherein vapor is produced by an electron beam that can be directed to uncovered crucible pockets, the assembly comprising:

a housing;

a crucible rotatably mounted within the housing, the crucible having a

surface;

a plurality of pockets in the crucible, the pockets configured to hold coating materials, and the crucible rotatable to bring any of the pockets into a position to receive energy from the electron beam;

a cover having a cover body with a covering surface and a cover opening wherein the covering surface faces the crucible, and a cover insert having an insert bottom surface and an open area that coincides with the cover opening wherein the cover insert is removably coupled to the cover body within the cover opening wherein the insert bottom surface extends below the covering surface bottom, the cover insert becomes partially decoupled from the cover body when the cover body is lowered relative to the crucible and the cover insert contacts the crucible; and matching pairs of cooperating surfaces on the cover insert and the crucible surface between each pocket.

10. The assembly of claim 9 wherein the cover insert has structural features

isolating each pocket from an adjacent pocket by contact between the cover insert and the crucible including isolating the uncovered pocket from the covered pockets.

1 1 . The assembly of claim 9 wherein the cover insert has an insert body that is V- shaped with an inside edge, an outside edge and a top surface.

12. The assembly of claim 1 1 wherein the top surface is tapered in thickness from the outside edge to the inside edge.

13. The assembly of claim 9 wherein the insert bottom surface of the cover insert has raised bottom portions having an insert bottom contact surface wherein the insert bottom contact surface is recessed a predefined distance from the inside edge.

14. The assembly of claim 9 wherein the insert bottom surface of the cover insert is recessed back away from the outside surface forming a ledge.

15. The assembly of claim 9 wherein the cover opening has a recess along a cover opening edge forming a cover body ledge that coincides with the cover insert ledge to matingly couple and partially decouple with the cover insert.

16. The assembly of claim 9 wherein the covering surface of the cover body has structural features that are capable of mating contact with corresponding structural features of the crucible further isolating each pocket from an adjacent pocket by contact between the covering surface and the crucible including isolating the uncovered pocket from the covered pockets.

17. A crucible covering system for a multiple pocket source, the system

comprising:

a crucible having an axis and a plurality of pockets to hold material to be evaporated wherein the crucible has a crucible surface between each pocket; and

a cover that extends along a plane perpendicular to the axis to cover all but a selected at least one of the plurality of pockets, the cover having a cover body with a cover opening to expose one pocket of the plurality of pockets, the cover body having a cover insert with an insert bottom surface and an open area that coincides with the cover opening wherein the cover insert is removably coupled to the cover body along a cover opening edge wherein the insert bottom surface extends below the covering surface wherein the cover insert becomes partially decoupled from the cover body when the cover body is lowered relative to the crucible and the cover insert contacts the crucible; and matching pairs of cooperating surfaces on the cover insert and the crucible surface between each pocket.

18. The assembly of claim 17 wherein the cover insert has an insert body that is V-shaped with an inside edge, an outside edge and a top surface.

19. The assembly of claim 18 wherein the top surface is tapered in thickness from the outside edge to the inside edge.

20. The assembly of claim 17 wherein the insert bottom surface of the cover insert has raised bottom portions having an insert bottom contact surface wherein the insert bottom contact surface is recessed a predefined distance from the inside edge.

21 . The assembly of claim 17 wherein the insert bottom surface of the cover insert is recessed back away from the outside surface forming a ledge.

22. The assembly of claim 17 wherein the cover opening has a recess along a cover opening edge forming a cover body ledge that coincides with the cover insert ledge to matingly couple and partially decouple with the cover insert.

23. The assembly of claim 17 wherein the covering surface of the cover body has structural features that are capable of mating contact with corresponding structural features of the crucible further isolating each pocket from an adjacent pocket by contact between the covering surface and the crucible including isolating the uncovered pocket from the covered pockets.