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1. WO2020110106 - FILTRE ACCORDABLE AYANT DIFFÉRENTS ÉCARTEMENTS

Note: Texte fondé sur des processus automatiques de reconnaissance optique de caractères. Seule la version PDF a une valeur juridique

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CLAIMS:

1. A tunable filter, comprising:

a pair of optical components, wherein there is an optical gap between the pair of optical components; and

a pair of actuating elements that are configured, once supplied with at least one actuating signal, to be positioned at an actuation gap from each other and to define the optical gap; and wherein the optical gap is substantially smaller than the actuation gap.

2. The tunable filter according to claim 1 wherein the pair of actuating elements, once suppli ed with the at least one actuating signal, are configured to move both optical components of the pair of optical components.

3. The tunable filter according to any of the preceding claims wherein the pair of actuating elements, once supplied with the at least one actuating signal, are configured to move only one optical component of the pair of optical components.

4. The tunable filter according to any of the preceding claims, wherein the pair of optical components comprises a first optical component and a second optical component; and wherein the pair of actuating elements comprises a first actuating element and a second actuating element.

5. The tunable filter according to claim 4 wherein an inner surface of the first optical component faces an inner surface of the second optical component; and wherein an inner surface of the first actuating element faces an inner surface of the second actuating element.

6. The tunable filter according to claim 5 wherein the inner surface of the first optical component is misaligned with the inner surface of the first actuating element.

7. The tunable filter according to claim 5 or 6 wherein the inner surface of the second optical component is misaligned with the inner surface of the second actuating element.

8. The tunable filter according to claim 4 comprising a first member, wherein the first member either comprises the first optical component or is mechanically coupled to the first optical component; and wherein the inner surface of the first actuating element is positioned within a recess formed in the first member.

9. The tunable filter according to claim 4 wherein the inner surface of the first actuating element is a part of a bottom of a first recess formed within the first actuating element.

10. The tunable filter according to claim 8, wherein the first member is movable and further comprising a a second stationary member, wherein the second member either comprises the second optical component or is mechanically coupled to the second optical component; and wherein the inner surface of the second actuating element is positioned within a recess formed in the second member.

11. The tunable filter according to claim 4 wherein the inner surface of the second actuating el ement is a part of a bottom of a second recess formed within the second actuating element.

12. The tunable filter according to claim 4 wherein the first actuating element is configured to move the first optical component in relation to a frame of the tunable filter; wherein a flexible element of the tunable filter is mechanically coupled to the frame and to the first optical element.

13. The tunable filter according to claim 12 wherein the flexible element is configured to seal a gap between the frame and the first optical component.

14. The tunable filter according to any of the preceding claims, wherein the tunable filter is a Fabry-Perot filter.

15. The tunable filter according to any of the preceding claims wherein the optical gap determines, at least in part, a parameter of an optical filtering operation applied by the tunable filter.

16. The tunable filter according to any of the preceding claims, wherein a size or dimensional difference between the optical gap and the actuation gap prevents a pull-in instability of the pair of actuating elements.

17. The tunable filter according to any of the preceding claims wherein a maximal optical gap is obtained without providing the at least one actuation signal to the pair of actuating elements.

18. The tunable filter according to any of the preceding claims wherein the pair of actuating elements and inner surfaces of the pair of optical components are positioned within an inner space defined by the tunable filter.

19. A tunable filter, comprising:

a first optical component;

a second optical component;

a frame;

a first actuating element;

a second actuating element; and

a flexible element;

wherein there is an optical gap between the first and second optical components; and wherein the first and second actuating elements are configured, once supplied with at least one actuating signal, to be positioned at an actuation gap from each other and to define the optical gap;

wherein the flexible element is mechanically coupled to the frame and to the first optical element; and

wherein the flexible element is configured to seal a gap between the frame and the first optical component.

20. The tunable filter according to claim 18 wherein the flexible element has a radial symmetry.

21. The tunable filter according to claim 18 wherein the flexible element has a serpentine shaped cross section.

22. A tunable filter comprising:

a first member that comprises a first optical region and one or more first actuation regions; a second member that comprises a second optical region corresponding to the first optical region defining a tunable optical gap therebetween;

wherein each of the one or more first actuation regions has a corresponding second actuation region, defining an actuation couple, each actuation couple defines an actuation gap therebetween;

wherein each actuation couple is configured to apply an actuation signal resulting in a tuning of the optical gap;

wherein each of the actuation gaps is greater than the optical gap.

23. The tunable filter of claim 22, comprising a frame, wherein the first member, the second member and the frame define a gas-tight sealed chamber.

24. The tunable filter of claim 22, wherein the gas-tight sealed chamber is characterized by vacuum conditions that is lower than 0.5 bar.

25. The tunable filter of claim 23 or 24, wherein the first actuation regions constitute one or more portions of the first member.

26. The tunable filter of any one of claims 23-25, wherein at least one of the second actuation regions is disposed external to the gas-tight sealed chamber.

27. The tunable filter of any one of claims 22-26, wherein the second actuation regions are formed on the second member.

28. The tunable filter of any one of claims 22-27, wherein the first member is formed of at least two layers, a first layer that comprises the first optical region and a second layer that comprises the first actuation regions.

29. The tunable filter of any one of claims 22-28, wherein the first actuation regions are formed in a recess in a portion of the first member.

30. The tunable filter of any one of claims 22-29, wherein the second actuation regions are formed in a recess in a portion of the second member.

31. The tunable filter of any one of claims 22-30, wherein the first member is integral with a first end of a corrugated/undulated flexible member that permits its movement that result in the tuning of the optical gap, the second end of the corrugated/undulated flexible member is integral with a static frame.

32. The tunable filter of claim 31 , wherein the flexible member constitutes a part of the first member.

33. The tunable filter of any one of claims 22-32, wherein the optical gap is tuned between a maximal, non-aetuated, gap and a minimal gap.

34. The tunable filter of any one of claims 22-33, comprising actuation elements that are formed in said first and second actuation regions.

35. The tunable filter of any one of claims 22-34, wherein the first member is movable and the second member is stationary.

36. The tunable filter of any one of claims 22-35, wherein the actuation signal results in a increase of the optical gap.

37. The tunable filter of any one of claims 22-35, wherein the actuation signal results in a decrease of the optical gap.

38. The tunable filter of any one of claims 22-37, wherein the first and the second optical regions are transparent or semi-transparent for at least a certain bandwidth of light.

39. The tunable filter of any one of claims 22-38, wherein at least one of the one or more first actuation regions is positioned in a recess or depression formed in the first member.

40. The tunable filter of any one of claims 22-39, wherein at least one of second actuation regions is positioned in a recess or depression formed in the second member.

41. The tunable filter of claim 39 or 40, wherein the recess or depression is being an etched portion.

42. A tunable filter comprising:

a movable member that comprises a first optical region and one or more first actuation regions;

a second member that comprises a second optical region matching to the first optical region with a tunable optical gap therebetween, and second actuation regions, each of the second actuation region corresponds to a first actuation region of the first member defining actuation couples; wherein each actuation couple is configured to apply an actuation signal resulting in a tuning of the optical gap;

wherein the first member is physically connected to a flexible member that allows the movement of the first member upon application of the actuation signal; and

wherein the flexible member is undulated/corrugated shaped.

43. The tunable filter of claim 42, wherein the flexible member links the first member and a static structure.

44. The tunable filter of claim 42 or 43, wherein the movable member, the flexible member and the second member enclose a gas-tight sealed volume, wherein optionally the membrane links the movable member to the static frame such that the gap spanned between the movable member and the second member is sealed to the ambient environment.

45. The tunable filter of claim 44, wherein said gas-tight sealed volume is at a pressure below the ambient pressure, wherein optionally said gas-tight sealed volume is under vacuum conditions.

46. The tunable filter of any one of claims 42-45, wherein the flexible member formed by a portion of processed silicon.

47. The tunable filter of claim 46, wherein the silicon is etched, wherein optionally the silicon is a deep reactive ion-etched.

48. The tunable filter of any one of claims 42-47, wherein the flexible member is formed of a portion of processed transparent/semi-transparent material, wherein optionally the processed transparent/semi-transparent material is a glass or polymer.

49. The tunable filter of claim 43, wherein the transparent/semi-transparent material is etched.

50. The tunable filter of any one of claim 42-49, wherein the at least one of the second and the first member comprises at least one stopper element that is configured to stop the first member at a minimal optical gap.

51. The tunable filter of claim 50, wherein the flexible member is configured to allow movement of the first member between a maximal, unactuated, optical gap, and said minimal optical gap.

52. The tunable filter of any one of claims 42-51, wherein the actuation signal is selected from one of electrostatic actuation, magnetic actuation and piezoelectric actuation.

53. The tunable filter of any one of claims 42-52, wherein the second member comprises the second actuation regions.

54. The tunable filter of any one of claims 42-53, wherein the tunable filter is MEMS-based filter

55. The tunable filter of claim 54, wherein the filter is an etalon filter.

56. The tunable filter of any one of claims 42-55, wherein the first member is a movable member and the second member is a stationary member.

57. The tunable filter of any one of claims 42-56, wherein the actuation couple is configured to apply an electrostatic actuation signal.