H | ELECTRICITY |
01 | BASIC ELECTRIC ELEMENTS |
L | SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR |
21 | Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof |
02 | Manufacture or treatment of semiconductor devices or of parts thereof |
04 | the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer |
18 | the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials |
30 | Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 |
302 | to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting |
306 | Chemical or electrical treatment, e.g. electrolytic etching |
308 | using masks |
3083 | characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane |
3086 | characterised by the process involved to create the mask, e.g. lift-off masks, sidewalls, or to modify the mask, e.g. pre-treatment, post-treatment |