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1. (WO2019063981) RÉDUCTION DE FLUCTUATION DE FRÉQUENCE RF DANS UN MODULATEUR MZ
Note: Texte fondé sur des processus automatiques de reconnaissance optique de caractères. Seule la version PDF a une valeur juridique

CLAIMS:

1. A waveguide structure for use in a balanced push-pull Mach Zehnder modulator, the waveguide structure comprising:

a plurality of layers, the layers comprising, in order:

an insulating or semi-insulating substrate 501 ;

an lower cladding layer 502;

an waveguide core layer 503; and

an upper cladding layer 504;

wherein the lower cladding layer, waveguide core layer, and upper cladding layer are etched to form:

a signal waveguide 512 and a ground waveguide 513, which are connected via the lower cladding layer; and

a signal line 51 1 and a ground line 514, each located adjacent to the respective waveguide, and each connected to the respective waveguide via one or more respective resistive structures 530 connected in the plane of the lower cladding layer.

2. A waveguide according to claim 1 , wherein each of the signal waveguide, ground waveguide, signal line, and ground line comprising a respective electrode 521 ,

522, 523, 524, wherein the electrodes of the signal line and signal waveguide are electrically connected to each other and the electrodes of the ground line and ground waveguide are electrically connected to each other

3. A waveguide structure according to claim 1 or 2, wherein the resistance of each of the resistive structures is between 10 Ohms and 10 kilo Ohms.

4. A waveguide structure according to any preceding claim, wherein the resistive structures are portions of the lower cladding layer.

5. A waveguide structure according claim 4, wherein the resistive structures each comprise an elongate portion of the lower cladding layer which is connected at one end to the corresponding waveguide and at the other end to the corresponding line by respective connecting portions of the lower cladding layer.

7. A waveguide structure according to any preceding claim, wherein each line electrode is connected to the respective waveguide electrode via a plurality of conductive elements which span a gap between the line and waveguide, and wherein a said resistive structure is provided for each conductive element.

8. A balanced push-pull Mach-Zehnder interferometer comprising a waveguide structure according to any preceding claim.

9. A method of manufacturing a waveguide structure for a Mach-Zehnder interferometer, the method comprising:

providing a layered structure comprising:

an insulating or semi-insulating substrate 501 ;

an lower cladding layer 502;

an waveguide core layer 503; and

a upper cladding layer 504;

etching the lower cladding layer, waveguide core layer, and upper cladding layer to form:

a signal waveguide 512 and a ground waveguide 513, which are connected via the lower cladding layer; and

a signal line 51 1 and a ground line 514, each located adjacent to the respective waveguide, and each connected to the respective waveguide via one or more respective resistive structures 530 in the plane of the lower cladding layer.

10. A method according to claim 9, and comprising depositing an electrode 521 , 522, 523, 524 on each of the signal waveguide, ground waveguide, signal line, and ground line, wherein the electrodes of the signal line and signal waveguide are electrically connected to each other and the electrodes of the ground line and ground waveguide are electrically connected to each other.