Recherche dans les collections de brevets nationales et internationales
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1. (WO2019050507) PROCÉDÉS DE MANIPULATION D'UN DISPOSITIF DE MASQUAGE, APPAREIL D'ÉCHANGE D'UN DISPOSITIF DE MASQUAGE, CHAMBRE D'ÉCHANGE DE MASQUE ET SYSTÈME SOUS VIDE



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INTERNATIONAL SEARCH REPORT (ISR)
Part 1:  1  2  3  4  5  6          Part 2:  A  B  C  D  E 
International application No. Applicant's or agent's file reference
PCT/US2017/050129 ZIMR0402PC
International filing date (day/month/year) (Earliest) Priority Date (day/month/year)
05 September 2017
Applicant
APPLIED MATERIALS, INC.
FOR FURTHER ACTION: See Form PCT/ISA/220 as well as, where applicable, item 5 below.
This international search report has been prepared by this International Searching Authority and is transmitted to the applicant according to Article 18. A copy is being transmitted to the International Bureau.
It is also accompanied by a copy of each prior art document cited in this report.
1. Basis of the report
a. With regard to the language, the international search was carried out on the basis of:
the international application in the language in which it was filed.
a translation of the international application into                                          which is the language of a translation furnished for the purposes of international search (Rules 12.3(a) and 23.1(b)).
b.
This international search report has been established taking into account the rectification of an obvious mistake authorized by or notified to this Authority under Rule 91 (Rule 43.6bis(a)).
c.
With regard to any nucleotide and/or amino acid sequence disclosed in the international application, the international search was carried out on the basis of a sequence listing:
2. Certain claims were found unsearchable
This international search report has not been established in respect of certain claims under Article 17(2)(a) for the following reasons:
1.
Claims Nos.:
because they relate to subject matter not required to be searched by this Authority, namely:
2.
Claims Nos.: 17
because they relate to parts of the international application that do not comply with the prescribed requirements to such an extent that no meaningful international search can be carried out, specifically:
Claim 17 is unclear in that said claim refers to claim 16 which do not comply with PCT Rule 6.4(a).
3.
Claims Nos.: 4-10,14-16
because they are dependent claims and are not drafted in accordance with the second and third sentences of Rule 6.4(a).
3. Unity of invention is lacking
4. Title of the invention
The text is approved as submitted by the applicant.
The text has been established by this Authority to read as follows:
5. Abstract
The text is approved as submitted by the applicant.
The text has been established, according to Rule 38.2, by this Authority as it appears in Box No. IV. The applicant may, within one month from the date of mailing of this international search report, submit comments to this Authority.
6. Drawings
a.
The figure of the drawings to be published with the abstract is Figure No.     1    
as suggested by the applicant.
as selected by this Authority, because the applicant failed to suggest a figure.
as selected by this Authority, because this figure better characterizes the invention.
b.
none of the figures is to be published with the abstract.

A. CLASSIFICATION OF SUBJECT MATTER

     H01L 51/56 (2006.01)i; H01L 51/00 (2006.01)i; H01L 21/67 (2006.01)i; H01L 21/033 (2006.01)i; G03F 7/20 (2006.01)i
According to International Patent Classification (IPC) or to both national classification and IPC

B. FIELDS SEARCHED

Minimum documentation searched (classification system followed by classification symbols):
Documentation searched other than minimum documentation to the extent that such documents are included in the fields searched:
Korean utility models and applications for utility modelsJapanese utility models and applications for utility models
Electronic data base consulted during the international search (name of data base and, where practicable, search terms used):
eKOMPASS(KIPO internal) & keywords: mask device, holding arrangement, mask carrier, non-horizontal state, transfer

C. DOCUMENTS CONSIDERED TO BE RELEVANT

Category* Citation of document, with indication, where appropriate, of the relevant passages Relevant to claim No.
(1)
A
KR 10-2014-0059003 A (SFA ENGINEERING CORP.) 15 May 2014 See paragraphs [0033]-[0072]; and figures 1-7.
1-3,11-13
(2)
A
US 2012-0070999 A1 (RALPH LINDENBERG) 22 March 2012 See paragraphs [0020]-[0033]; and figures 1A-5.
1-3,11-13
(3)
A
WO 2015-171226 A1 (APPLIED MATERIALS, INC.) 12 November 2015 See paragraphs [0033]-[0040]; and figure 1D.
1-3,11-13
(4)
A
WO 2016-112951 A1 (APPLIED MATERIALS, INC.) 21 July 2016 See paragraphs [0020]-[0078]; and figures 2-8F.
1-3,11-13
(5)
A
WO 2015-117638 A1 (APPLIED MATERIALS, INC.) 13 August 2015 See paragraphs [0012]-[0142]; and figures 1A-18.
1-3,11-13
*
Special categories of cited documents:
"A"
document defining the general state of the art which is not considered to be of particular relevance
"E"
earlier application or patent but published on or after the international filing date
"L"
document which may throw doubts on priority claim(s) or which is cited to establish the publication date of another citation or other special reason (as specified)
"O"
document referring to an oral disclosure, use, exhibition or other means
"P"
document published prior to the international filing date but later than the priority date claimed
"T"
later document published after the international filing date or priority date and not in conflict with the application but cited to understand the principle or theory underlying the invention
"X"
document of particular relevance; the claimed invention cannot be considered novel or cannot be considered to involve an inventive step when the document is taken alone
"Y"
document of particular relevance; the claimed invention cannot be considered to involve an inventive step when the document is combined with one or more other such documents, such combination being obvious to a person skilled in the art
"&"
document member of the same patent family

D. INFORMATION ON PATENT FAMILY MEMBERS

Patent document cited in search report Publication date
(day/month/year)
Patent family member(s) Publication date
(day/month/year)
KR 10-2014-0059003 A
15 May 2014
KR 10-1419355 B1
15 July 2014
US 2012-0070999 A1
22 March 2012
EP 2432008 A1
EP 2432008 B1
US 8431493 B2
21 March 2012
24 June 2015
30 April 2013
WO 2015-171226 A1
12 November 2015
CN 106575720 A
JP 2017-515301 A
KR 10-2017-0002603 A
TW 201606902 A
US 10096509 B2
US 2018-0166316 A1
19 April 2017
08 June 2017
06 January 2017
16 February 2016
09 October 2018
14 June 2018
WO 2016-112951 A1
21 July 2016
CN 107109621 A
EP 3245311 A1
JP 2018-504526 A
KR 10-2017-0102016 A
TW 201633444 A
US 2018-0030596 A1
29 August 2017
22 November 2017
15 February 2018
06 September 2017
16 September 2016
01 February 2018
WO 2015-117638 A1
13 August 2015
CN 105917019 A
CN 107201501 A
EP 3102715 A1
JP 2017-506703 A
KR 10-2016-0118251 A
KR 10-2017-0081714 A
TW 201542300 A
TW 201711760 A
TW 201733689 A
TW 201825193 A
TW I611847 B
TW I617364 B
US 2017-0244070 A1
US 9899635 B2
31 August 2016
26 September 2017
14 December 2016
09 March 2017
11 October 2016
12 July 2017
16 November 2015
01 April 2017
01 October 2017
16 July 2018
21 January 2018
11 March 2018
24 August 2017
20 February 2018
Name and mailing address of the ISA/:
Korean Intellectual Property Office
189 Cheongsa-ro, Seo-gu, Daejeon Metropolitan City, 302-701
Republic of Korea
Facsimile No. +82-42-481-8578
Date of the actual completion of the international search:
18 December 2018
Date of mailing of the international search report:
18 December 2018
Authorized officer:
KWON, Yong Kyong
Telephone No. +82-42-481-3371
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