Recherche dans les collections de brevets nationales et internationales
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International application No. Applicant's or agent's file reference
PCT/US2018/042635 LAM1P576WO
International filing date (day/month/year) (Earliest) Priority Date (day/month/year)
18 July 2018 11 August 2017
FOR FURTHER ACTION: See Form PCT/ISA/220 as well as, where applicable, item 5 below.
This international search report has been prepared by this International Searching Authority and is transmitted to the applicant according to Article 18. A copy is being transmitted to the International Bureau.
It is also accompanied by a copy of each prior art document cited in this report.
1. Basis of the report
a. With regard to the language, the international search was carried out on the basis of:
the international application in the language in which it was filed.
a translation of the international application into                                          which is the language of a translation furnished for the purposes of international search (Rules 12.3(a) and 23.1(b)).
This international search report has been established taking into account the rectification of an obvious mistake authorized by or notified to this Authority under Rule 91 (Rule 43.6bis(a)).
With regard to any nucleotide and/or amino acid sequence disclosed in the international application, the international search was carried out on the basis of a sequence listing:
2. Certain claims were found unsearchable
3. Unity of invention is lacking
4. Title of the invention
The text is approved as submitted by the applicant.
The text has been established by this Authority to read as follows:
5. Abstract
The text is approved as submitted by the applicant.
The text has been established, according to Rule 38.2, by this Authority as it appears in Box No. IV. The applicant may, within one month from the date of mailing of this international search report, submit comments to this Authority.
6. Drawings
The figure of the drawings to be published with the abstract is Figure No.     3    
as suggested by the applicant.
as selected by this Authority, because the applicant failed to suggest a figure.
as selected by this Authority, because this figure better characterizes the invention.
none of the figures is to be published with the abstract.


     H01L 21/677 (2006.01)i; H01L 21/67 (2006.01)i
According to International Patent Classification (IPC) or to both national classification and IPC


Minimum documentation searched (classification system followed by classification symbols):
Documentation searched other than minimum documentation to the extent that such documents are included in the fields searched:
Korean utility models and applications for utility modelsJapanese utility models and applications for utility models
Electronic data base consulted during the international search (name of data base and, where practicable, search terms used):
eKOMPASS(KIPO internal) & Keywords: transporting, wafer, vacuum, pump, portable


Category* Citation of document, with indication, where appropriate, of the relevant passages Relevant to claim No.
US 2003-0063965 A1 (JOHN GILES LANGAN et al.) 03 April 2003 See paragraphs [0027]-[0051], claim 1 and figure 2.
JP 09-027542 A (HITACHI LTD. et al.) 28 January 1997 See paragraphs [0009]-[0027] and figures 1-2.
US 6043137 A (GORDON P. KRUEGER et al.) 28 March 2000 See column 5, line 12 - column 7, line 28 and figures 1-2.
US 2014-0271053 A1 (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.) 18 September 2014 See paragraphs [0012]-[0035] and figures 1-5.
WO 98-48168 A2 (SAES PURE GAS, INC.) 29 October 1998 See page 11, line 3 - page 15, line 22 and figure 1.
Special categories of cited documents:
document defining the general state of the art which is not considered to be of particular relevance
earlier application or patent but published on or after the international filing date
document which may throw doubts on priority claim(s) or which is cited to establish the publication date of another citation or other special reason (as specified)
document referring to an oral disclosure, use, exhibition or other means
document published prior to the international filing date but later than the priority date claimed
later document published after the international filing date or priority date and not in conflict with the application but cited to understand the principle or theory underlying the invention
document of particular relevance; the claimed invention cannot be considered novel or cannot be considered to involve an inventive step when the document is taken alone
document of particular relevance; the claimed invention cannot be considered to involve an inventive step when the document is combined with one or more other such documents, such combination being obvious to a person skilled in the art
document member of the same patent family


Patent document cited in search report Publication date
Patent family member(s) Publication date
US 2003-0063965 A1
03 April 2003
TW 570890 B
US 6637998 B2
11 January 2004
28 October 2003
JP 09-027542 A
28 January 1997
US 6043137 A
28 March 2000
CA 2203904 C
CA 2485918 A1
CN 1170441 A
CN 1174593 A
CN 1177079 C
CN 1609447 A
EP 0789788 A1
EP 0789788 B1
EP 0795084 A2
EP 0795084 B1
JP 10-508078 A
JP 10-510024 A
JP 2007-127130 A
JP 3574661 B2
JP 3943128 B2
JP 4580943 B2
KR 10-0302178 B1
KR 10-0304449 B1
TW 408794 A
US 5685963 A
US 5879134 A
US 5911560 A
US 5972183 A
US 5980213 A
US 5993165 A
US 5997255 A
US 6109880 A
US 6142742 A
US 6165328 A
WO 96-13620 A1
WO 96-17171 A3
12 February 2002
06 June 1996
14 January 1998
25 February 1998
24 November 2004
27 April 2005
07 January 1998
02 May 2003
17 December 1997
17 October 2001
04 August 1998
29 September 1998
24 May 2007
06 October 2004
11 July 2007
17 November 2010
21 March 2002
29 September 2001
11 October 2000
11 November 1997
09 March 1999
15 June 1999
26 October 1999
09 November 1999
30 November 1999
07 December 1999
29 August 2000
07 November 2000
26 December 2000
09 May 1996
24 October 1996
US 2014-0271053 A1
18 September 2014
CN 104051310 A
CN 104051310 B
KR 10-1888236 B1
KR 10-2014-0113302 A
KR 10-2016-0028428 A
US 9748123 B2
17 September 2014
27 October 2017
13 August 2018
24 September 2014
11 March 2016
29 August 2017
WO 98-48168 A2
29 October 1998
CN 1252844 A
EP 1012478 A2
JP 2001-524872 A
KR 10-2001-0006278 A
WO 98-48168 A3
10 May 2000
28 June 2000
04 December 2001
26 January 2001
24 February 2000
Name and mailing address of the ISA/:
Korean Intellectual Property Office
189 Cheongsa-ro, Seo-gu, Daejeon Metropolitan City, 302-701
Republic of Korea
Facsimile No. +82-42-481-8578
Date of the actual completion of the international search:
06 November 2018
Date of mailing of the international search report:
06 November 2018
Authorized officer:
CHOI, Sang Won
Telephone No. +82-42-481-8291
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