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1. (WO2019000021) MOYEN DE GESTION D'ÉCHANTILLON POUR MICROSCOPIE À FAISCEAU DE PARTICULES
Note: Texte fondé sur des processus automatiques de reconnaissance optique de caractères. Seule la version PDF a une valeur juridique

Claims

1. Specimen control means for use with focussed charged particle beam instruments comprising:

(a) a multi-directional motion stage placed at ambient (external) conditions; and (b) a specimen stub removably coupled with said stage; and

(c) a specimen on said stub being impinged by said particle beam; and

(d) a chamber with flexible or shiftable walls enclosing said specimen with stub; and

(e) a sealingly locking but movable and removable port plate coupling (connecting) the said stub with the said external stage

2. Specimen control means for use with focussed charged particle beam instruments comprising:

(a) a specimen chamber with an environmental gas under different conditions from the surrounding ambient conditions of pressure, temperature and nature of

atmosphere; and

(b) means for directed (streamed) delivery of said environmental gas at the specimen preventing contamination of the instrument and specimen.

3. Specimen control means for use with stationary focussed charged particle beam

instruments comprising mechanical scanning of the specimen relative to the stationary beam.

4. Specimen control means for use with focussed charged particle beam instruments according to any combination of claims 1 , 2 and 3.

5. Specimen control means according to claim 3 comprising:

(a) A transmission electron microscope; and

(b) a specimen chamber with ambient atmosphere sealingly separated from the

electron optics column by a set of two apertures; and

(c) the said apertures with size of the order of micro-meters; and

(d) a thin specimen section in the chamber being shifted and scanned by mechanical means to sequentially (consecutively, or serially) survey and store information from any desired area of the specimen.

6. Specimen control means according to claim 3 comprising:

(a) A transmission electron microscope; and

(b) An insertable micro-chamber with environmental gas sealingly separated from the electron optics column by a set of two apertures; and

(c) the said apertures with size of the^fftSf ¾ ¥nicro-meters; and

(Rule 26) RO/AU

(d) a thin specimen section in the micro-chamber being shifted and scanned by mechanical means to sequentially (consecutively, or serially) survey and store information from any desired area of the specimen.

7. A specimen chamber according to claim 2, wherein said gas supply is delivered either at sufficient subsonic speed to remove overlaying loose particles from a specimen surface and prevent contamination in the electron optics column, or via an annular opening around a pressure limiting aperture at supersonic speed to provide pumping action from above the aperture.

8. A device according to any of claims 2 or 3, wherein the addition of a light optical

microscope allows for the simultaneous or sequential examination of the specimen by the electrons and the photons respectively of the two microscopes.

9. A specimen chamber according to claims 1 , 2 or 3 wherein the chamber is evacuated via the gas flow through any pressure limiting aperture while the gas is replenished via a leak valve, or via the means according to claim 2, or by recirculating the gas from the column to obtain a desired environment in the chamber.

10. A method with specimen control means for use with focussed charged particle beam instruments according to any of prior claims or a combination thereof.

Substitute Sheet

(Rule 26) RO/AU