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1. (WO2017003646) BOUCLIER THERMIQUE POUR PORTE-SUBSTRAT ÉLECTROSTATIQUE



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INTERNATIONAL SEARCH REPORT (ISR)
Part 1:  1  2  3  4  5  6          Part 2:  A  B  C  D  E 
International application No. Applicant's or agent's file reference
PCT/US2016/036000 023121-PCTP
International filing date (day/month/year) (Earliest) Priority Date (day/month/year)
06 June 2016 29 June 2015
Applicant
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
FOR FURTHER ACTION: See Form PCT/ISA/220 as well as, where applicable, item 5 below.
This international search report has been prepared by this International Searching Authority and is transmitted to the applicant according to Article 18. A copy is being transmitted to the International Bureau.
It is also accompanied by a copy of each prior art document cited in this report.
1. Basis of the report
a. With regard to the language, the international search was carried out on the basis of:
the international application in the language in which it was filed.
a translation of the international application into                                          which is the language of a translation furnished for the purposes of international search (Rules 12.3(a) and 23.1(b)).
b.
This international search report has been established taking into account the rectification of an obvious mistake authorized by or notified to this Authority under Rule 91 (Rule 43.6bis(a)).
c.
With regard to any nucleotide and/or amino acid sequence disclosed in the international application, the international search was carried out on the basis of a sequence listing:
2. Certain claims were found unsearchable
3. Unity of invention is lacking
4. Title of the invention
The text is approved as submitted by the applicant.
The text has been established by this Authority to read as follows:
5. Abstract
The text is approved as submitted by the applicant.
The text has been established, according to Rule 38.2, by this Authority as it appears in Box No. IV. The applicant may, within one month from the date of mailing of this international search report, submit comments to this Authority.
6. Drawings
a.
The figure of the drawings to be published with the abstract is Figure No.     1    
as suggested by the applicant.
as selected by this Authority, because the applicant failed to suggest a figure.
as selected by this Authority, because this figure better characterizes the invention.
b.
none of the figures is to be published with the abstract.

A. CLASSIFICATION OF SUBJECT MATTER

     H01L 21/683 (2006.01)i; H01L 21/67 (2006.01)i; H01L 21/324 (2006.01)i; H01L 21/02 (2006.01)i
According to International Patent Classification (IPC) or to both national classification and IPC

B. FIELDS SEARCHED

Minimum documentation searched (classification system followed by classification symbols):
Documentation searched other than minimum documentation to the extent that such documents are included in the fields searched:
Korean utility models and applications for utility modelsJapanese utility models and applications for utility models
Electronic data base consulted during the international search (name of data base and, where practicable, search terms used):
eKOMPASS(KIPO internal) & Keywords: electrostatic chuck, base, thermal shield, polyimide film, reflective material, insulator, washer, coating

C. DOCUMENTS CONSIDERED TO BE RELEVANT

Category* Citation of document, with indication, where appropriate, of the relevant passages Relevant to claim No.
(1)
X
US 2013-0072024 A1 (LAM RESEARCH CORPORATION) 21 March 2013 See abstract; paragraphs [0032], [0042], [0045]; and figure 9.
1-5,9,14-15
Y
6-8,10-13
(2)
Y
JP 2000-044345 A (NGK INSULATORS LTD.) 15 February 2000 See abstract; paragraph [0084]; and figure 9.
6-8,10-13
(3)
A
US 7033444 B1 ((KOMINO et al.) 25 April 2006 See abstract; column 8, lines 32-61, column 9, lines 11-55; and figures 2, 4.
1-15
(4)
A
US 2005-0211385 A1 (BENJAMIN et al.) 29 September 2005 See abstract; paragraphs [0022], [0024], [0035]; and figures 3, 5.
1-15
(5)
A
US 2010-0103584 A1 (NAM, CHANG KIL) 29 April 2010 See abstract; paragraphs [0040]-[0058]; and figure 2-3.
1-15
*
Special categories of cited documents:
"A"
document defining the general state of the art which is not considered to be of particular relevance
"E"
earlier application or patent but published on or after the international filing date
"L"
document which may throw doubts on priority claim(s) or which is cited to establish the publication date of another citation or other special reason (as specified)
"O"
document referring to an oral disclosure, use, exhibition or other means
"P"
document published prior to the international filing date but later than the priority date claimed
"T"
later document published after the international filing date or priority date and not in conflict with the application but cited to understand the principle or theory underlying the invention
"X"
document of particular relevance; the claimed invention cannot be considered novel or cannot be considered to involve an inventive step when the document is taken alone
"Y"
document of particular relevance; the claimed invention cannot be considered to involve an inventive step when the document is combined with one or more other such documents, such combination being obvious to a person skilled in the art
"&"
document member of the same patent family

D. INFORMATION ON PATENT FAMILY MEMBERS

Patent document cited in search report Publication date
(day/month/year)
Patent family member(s) Publication date
(day/month/year)
US 2013-0072024 A1
21 March 2013
CN 101095212 A
CN 101095212 B
JP 2008-527694 A
JP 4881319 B2
KR 10-1094122 B1
KR 10-2007-0121637 A
KR 10-2009-0089449 A
KR 10-2010-0034770 A
SG 158164 A1
TW I403617 B
US 2006-144516 A1
US 2009-078360 A1
US 2012-018411 A1
US 2014-332161 A1
US 8038796 B2
US 8051556 B2
US 8735298 B2
US 8821639 B2
WO 2006-073947 A2
WO 2006-073947 A3
26 December 2007
06 July 2011
24 July 2008
22 February 2012
15 December 2011
27 December 2007
21 August 2009
01 April 2010
29 January 2010
01 August 2013
06 July 2006
26 March 2009
26 January 2012
13 November 2014
18 October 2011
08 November 2011
27 May 2014
02 September 2014
13 July 2006
05 April 2007
JP 2000-044345 A
15 February 2000
JP 4641569 B2
US 6239402 B1
02 March 2011
29 May 2001
US 7033444 B1
25 April 2006
DE 60026996 T2
EP 1205964 A1
EP 1205964 A4
EP 1205964 B1
JP 2001-068538 A
KR 10-0452649 B1
TW 483087 B
WO 00-79575 A1
15 March 2007
15 May 2002
02 February 2005
29 March 2006
16 March 2001
12 October 2004
11 April 2002
28 December 2000
US 2005-0211385 A1
29 September 2005
CN 101111934 A
CN 101283624 A
CN 101283624 B
CN 101335186 A
CN 101335186 B
CN 102122607 A
CN 102122607 B
CN 1529994 A
CN 1529994 C
EP 1391140 A1
EP 1391140 B1
JP 2004-533718 A
JP 2008-522446 A
JP 2009-200529 A
JP 2009-512193 A
JP 2011-244011 A
JP 2014-146822 A
JP 4549022 B2
JP 4994382 B2
JP 5388704 B2
KR 10-0880132 B1
KR 10-1109440 B1
KR 10-1364319 B1
KR 10-2007-0088758 A
SG 10201408008 A
SG 158101 A1
TW 267160 A
TW I267160 B
TW I319608 A
TW I319608 B
TW I481297 B
US 2005-0173403 A1
US 2005-0173404 A1
US 2007-0007276 A1
US 2007-0086144 A1
US 2009-0215201 A1
US 2015-0187619 A1
US 6847014 B1
US 7161121 B1
US 7274004 B2
US 7718932 B2
US 8536494 B2
US 8963052 B2
WO 02-089531 A1
WO 2006-068805 A1
WO 2006-068805 A9
WO 2007-041668 A1
23 January 2008
08 October 2008
20 July 2011
31 December 2008
13 April 2011
13 July 2011
20 March 2013
15 September 2004
09 July 2008
25 February 2004
10 October 2012
04 November 2004
26 June 2008
03 September 2009
19 March 2009
01 December 2011
14 August 2014
22 September 2010
08 August 2012
15 January 2014
23 January 2009
31 January 2012
18 February 2014
29 August 2007
29 January 2015
29 January 2010
21 November 2006
21 November 2006
11 January 2010
11 January 2010
11 April 2015
11 August 2005
11 August 2005
11 January 2007
19 April 2007
27 August 2009
02 July 2015
25 January 2005
09 January 2007
25 September 2007
18 May 2010
17 September 2013
24 February 2015
07 November 2002
29 June 2006
24 August 2006
12 April 2007
US 2010-0103584 A1
29 April 2010
CN 101728297 A
KR 10-2010-0046909 A
TW 201032313 A
09 June 2010
07 May 2010
01 September 2010
Name and mailing address of the ISA/:
Korean Intellectual Property Office
189 Cheongsa-ro, Seo-gu, Daejeon Metropolitan City, 302-701
Republic of Korea
Facsimile No. +82-42-481-8578
Date of the actual completion of the international search:
24 August 2016
Date of mailing of the international search report:
24 August 2016
Authorized officer:
HAN, JOONG SUB
Telephone No. +82-42-481-3578
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