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1. WO2016124345 - PROCÉDÉ DE MÉTROLOGIE, APPAREIL DE MÉTROLOGIE, ET PROCÉDÉ DE FABRICATION DE DISPOSITIF


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INTERNATIONAL SEARCH REPORT (ISR)
Part 1:  1  2  3  4  5  6          Part 2:  A  B  C  D  E 
International application No. Applicant's or agent's file reference
PCT/EP2016/050098 2014P00199WO
International filing date (day/month/year) (Earliest) Priority Date (day/month/year)
06 January 2016 04 February 2015
Applicant
ASML NETHERLANDS B.V.
FOR FURTHER ACTION: See Form PCT/ISA/220 as well as, where applicable, item 5 below.
This international search report has been prepared by this International Searching Authority and is transmitted to the applicant according to Article 18. A copy is being transmitted to the International Bureau.
It is also accompanied by a copy of each prior art document cited in this report.
1. Basis of the report
a. With regard to the language, the international search was carried out on the basis of:
the international application in the language in which it was filed.
a translation of the international application into                                          which is the language of a translation furnished for the purposes of international search (Rules 12.3(a) and 23.1(b)).
b.
This international search report has been established taking into account the rectification of an obvious mistake authorized by or notified to this Authority under Rule 91 (Rule 43.6bis(a)).
c.
With regard to any nucleotide and/or amino acid sequence disclosed in the international application, the international search was carried out on the basis of a sequence listing:
2. Certain claims were found unsearchable
3. Unity of invention is lacking
4. Title of the invention
The text is approved as submitted by the applicant.
The text has been established by this Authority to read as follows:
5. Abstract
The text is approved as submitted by the applicant.
The text has been established, according to Rule 38.2, by this Authority as it appears in Box No. IV. The applicant may, within one month from the date of mailing of this international search report, submit comments to this Authority.
6. Drawings
a.
The figure of the drawings to be published with the abstract is Figure No.     5    
as suggested by the applicant.
as selected by this Authority, because the applicant failed to suggest a figure.
as selected by this Authority, because this figure better characterizes the invention.
b.
none of the figures is to be published with the abstract.

A. CLASSIFICATION OF SUBJECT MATTER

     G03F 7/20 (2006.01)i; G01N 23/201 (2006.01)i; G01N 21/956 (2006.01)i
According to International Patent Classification (IPC) or to both national classification and IPC

B. FIELDS SEARCHED

Minimum documentation searched (classification system followed by classification symbols):
     G03F; G01N
Documentation searched other than minimum documentation to the extent that such documents are included in the fields searched:
Electronic data base consulted during the international search (name of data base and, where practicable, search terms used):
EPO-Internal

C. DOCUMENTS CONSIDERED TO BE RELEVANT

Category* Citation of document, with indication, where appropriate, of the relevant passages Relevant to claim No.
(1)
X
US 2008273662 A1 (YUN WENBING [US] ET AL) 06 November 2008 (2008-11-06)
1,5-15
paragraphs [0007], [0030] - [0035], [0049]; figures 1,2
(2)
X
US 2011235029 A1 (KANEKO MAKOTO [JP] ET AL) 29 September 2011 (2011-09-29)
1,5-15
paragraphs [0005] - [0007], [0024] - [0029]; figures 1A,1B
(3)
X
US 2011135062 A1 (ISHIBASHI YASUHIKO [JP]) 09 June 2011 (2011-06-09)
1,5-15
paragraphs [0027], [0028], [0048] - [0050], [0052]; figures 1A, 1B, 13, 14
(4)
X
P. LEMAILLET ET AL, "Intercomparison between optical and x-ray scatterometry measurements of FinFET structures", OPTICAL SENSING II,Vol. 8681, 10 April 2013 (2013-04-10), page 86810Q,
XP055267051
9-15
A
section 2.3;figure 2
1-8
(5)
X,P
US 2015369759 A1 (MAZOR ISAAC [IL] ET AL) 24 December 2015 (2015-12-24)
1,5-15
paragraphs [0068], [0070], [0074] - [0076], [0085], [0086]; figures 5, 6A, 6B, 8
(6)
X,P
US 2015204802 A1 (POIS HEATH A [US] ET AL) 23 July 2015 (2015-07-23)
1,5-15
paragraph [0027]; figure 3
*
Special categories of cited documents:
"A"
document defining the general state of the art which is not considered to be of particular relevance
"D"
document cited by the applicant in the international application
"E"
earlier application or patent but published on or after the international filing date
"L"
document which may throw doubts on priority claim(s) or which is cited to establish the publication date of another citation or other special reason (as specified)
"O"
document referring to an oral disclosure, use, exhibition or other means
"P"
document published prior to the international filing date but later than the priority date claimed
"T"
later document published after the international filing date or priority date and not in conflict with the application but cited to understand the principle or theory underlying the invention
"X"
document of particular relevance; the claimed invention cannot be considered novel or cannot be considered to involve an inventive step when the document is taken alone
"Y"
document of particular relevance; the claimed invention cannot be considered to involve an inventive step when the document is combined with one or more other such documents, such combination being obvious to a person skilled in the art
"&"
document member of the same patent family

D. INFORMATION ON PATENT FAMILY MEMBERS

Patent document cited in search report Publication date
(day/month/year)
Patent family member(s) Publication date
(day/month/year)
US 2008273662 A1
06 November 2008
NONE
US 2011235029 A1
29 September 2011
JP 2011203061 A
US 2011235029 A1
13 October 2011
29 September 2011
US 2011135062 A1
09 June 2011
JP 5367549 B2
JP 2011117894 A
US 2011135062 A1
11 December 2013
16 June 2011
09 June 2011
US 2015369759 A1
24 December 2015
KR 20150146453 A
TW 201602568 A
US 2015369759 A1
31 December 2015
16 January 2016
24 December 2015
US 2015204802 A1
23 July 2015
TW 201534863 A
US 2015204802 A1
WO 2015112444 A1
16 September 2015
23 July 2015
30 July 2015
Name and mailing address of the ISA/:
European Patent Office
P.B. 5818, Patentlaan 2, 2280 HV Rijswijk,
Netherlands
Telephone No. (+31-70)340-2040
Facsimile No. (+31-70)340-3016
Date of the actual completion of the international search:
22 April 2016
Date of mailing of the international search report:
30 May 2016
Authorized officer:
Weckesser, Jens
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