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1. WO2015090373 - ENSEMBLE ÉLECTRODE POUR APPAREIL DE DÉPÔT ET PROCÉDÉ POUR ASSEMBLER LEDIT ENSEMBLE ÉLECTRODE

Numéro de publication WO/2015/090373
Date de publication 25.06.2015
N° de la demande internationale PCT/EP2013/076984
Date du dépôt international 17.12.2013
CIB
H01J 37/34 2006.01
HÉLECTRICITÉ
01ÉLÉMENTS ÉLECTRIQUES FONDAMENTAUX
JTUBES À DÉCHARGE ÉLECTRIQUE OU LAMPES À DÉCHARGE ÉLECTRIQUE
37Tubes à décharge pourvus de moyens permettant l'introduction d'objets ou d'un matériau à exposer à la décharge, p.ex. pour y subir un examen ou un traitement
32Tubes à décharge en atmosphère gazeuse
34fonctionnant par pulvérisation cathodique
CPC
H01J 37/3405
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes, ; e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
34operating with cathodic sputtering
3402using supplementary magnetic fields
3405Magnetron sputtering
H01J 37/342
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes, ; e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
34operating with cathodic sputtering
3411Constructional aspects of the reactor
3414Targets
342Hollow targets
H01J 37/3435
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes, ; e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
34operating with cathodic sputtering
3411Constructional aspects of the reactor
3435Target holders (includes backing plates and endblocks)
H01J 37/3452
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes, ; e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
34operating with cathodic sputtering
3411Constructional aspects of the reactor
345Magnet arrangements in particular for cathodic sputtering apparatus
3452Magnet distribution
H01J 37/3455
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes, ; e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
34operating with cathodic sputtering
3411Constructional aspects of the reactor
345Magnet arrangements in particular for cathodic sputtering apparatus
3455Movable magnets
H01J 37/3461
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes, ; e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
34operating with cathodic sputtering
3411Constructional aspects of the reactor
3461Means for shaping the magnetic field, e.g. magnetic shunts
Déposants
  • APPLIED MATERIALS, INC. [US]/[US] (AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BE, BF, BG, BH, BJ, BN, BR, BW, BY, BZ, CA, CF, CG, CH, CI, CL, CM, CN, CO, CR, CU, CY, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, FR, GA, GB, GD, GE, GH, GM, GN, GQ, GR, GT, GW, HN, HR, HU, ID, IE, IL, IN, IR, IS, IT, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LV, LY, MA, MC, MD, ME, MG, MK, ML, MN, MR, MT, MW, MX, MY, MZ, NA, NE, NG, NI, NL, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SI, SK, SL, SM, SN, ST, SV, SY, SZ, TD, TG, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, UZ, VC, VN, ZA, ZM, ZW)
  • HELLMICH, Anke [DE]/[DE] (US)
  • SCHNAPPENBERGER, Frank [DE]/[DE] (US)
  • LOPP, Andreas [DE]/[DE] (US)
  • GEBELE, Thomas [DE]/[DE] (US)
Inventeurs
  • HELLMICH, Anke
  • SCHNAPPENBERGER, Frank
  • LOPP, Andreas
  • GEBELE, Thomas
Mandataires
  • ZIMMERMANN & PARTNER
Données relatives à la priorité
Langue de publication anglais (EN)
Langue de dépôt anglais (EN)
États désignés
Titre
(EN) ELECTRODE ASSEMBLY FOR DEPOSITION APPARATUS AND METHOD FOR ASSEMBLING SAID ELECTRODE ASSEMBLY
(FR) ENSEMBLE ÉLECTRODE POUR APPAREIL DE DÉPÔT ET PROCÉDÉ POUR ASSEMBLER LEDIT ENSEMBLE ÉLECTRODE
Abrégé
(EN)
An electrode assembly (120; 200; 300; 400; 700; 800; 900) for a sputter deposition apparatus is provided. The electrode assembly includes an assembly element (210; 310; 410; 710; 810; 910) for at least one of providing material to be deposited and holding a rotatable target; a magnet system (230; 330; 430; 730; 830; 930) disposed inside the assembly element (210; 310; 410; 710; 810; 910); and a pole piece (240; 241; 242; 340; 341; 342; 440; 441; 442; 740; 741; 742; 840; 841; 842; 940; 941; 942) for being disposed between the magnet system and the assembly element. Further, a method for assembling an electrode assembly with a magnet system (230; 330; 430; 730; 830; 930) is described.
(FR)
L'invention porte sur un ensemble électrode (120; 200; 300; 400; 700; 800; 900) pour un appareil de dépôt par pulvérisation. L'ensemble électrode comprend un élément d'ensemble (210; 310; 410; 710; 810; 910) afin de fournir du matériau à déposer et/ou de retenir une cible rotative; un système d'aimant (230; 330; 430; 730; 830; 930) disposé à l'intérieur de l'élément d'ensemble (210; 310; 410; 710; 810; 910); une pièce polaire (240; 241; 242; 340; 341; 342; 440; 441; 442; 740; 741; 742; 840; 841; 842; 940; 941; 942) pour être disposée entre le système d'aimant et l'élément d'ensemble. L'invention porte en outre sur un procédé pour assembler un ensemble électrode avec un système d'aimant (230; 330; 430; 730; 830; 930).
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