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1. WO2007143144 - DISPOSITIF ET PROCÉDÉ DE GÉNÉRATION D'UN FAISCEAU LASER À FAIBLE DIVERGENCE ET HAUTE PUISSANCE DESTINÉ À DES APPLICATIONS DE TRAITEMENT DE MATÉRIAUX

Numéro de publication WO/2007/143144
Date de publication 13.12.2007
N° de la demande internationale PCT/US2007/013029
Date du dépôt international 31.05.2007
CIB
B23K 26/08 2006.01
BTECHNIQUES INDUSTRIELLES; TRANSPORTS
23MACHINES-OUTILS; TRAVAIL DES MÉTAUX NON PRÉVU AILLEURS
KBRASAGE OU DÉBRASAGE; SOUDAGE; REVÊTEMENT OU PLACAGE PAR BRASAGE OU SOUDAGE; DÉCOUPAGE PAR CHAUFFAGE LOCALISÉ, p.ex. DÉCOUPAGE AU CHALUMEAU; TRAVAIL PAR RAYON LASER
26Travail par rayon laser, p.ex. soudage, découpage ou perçage 
08Dispositifs comportant un mouvement relatif entre le faisceau laser et la pièce
CPC
B23K 2101/34
BPERFORMING OPERATIONS; TRANSPORTING
23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
2101Articles made by soldering, welding or cutting
34Coated articles ; , e.g. plated or painted; Surface treated articles
B23K 2101/40
BPERFORMING OPERATIONS; TRANSPORTING
23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
2101Articles made by soldering, welding or cutting
36Electric or electronic devices
40Semiconductor devices
B23K 2103/50
BPERFORMING OPERATIONS; TRANSPORTING
23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
2103Materials to be soldered, welded or cut
50Inorganic material, e.g. metals, not provided for in B23K2103/02B23K2103/26
B23K 26/03
BPERFORMING OPERATIONS; TRANSPORTING
23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
26Working by laser beam, e.g. welding, cutting or boring
02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
03Observing, e.g. monitoring, the workpiece
B23K 26/034
BPERFORMING OPERATIONS; TRANSPORTING
23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
26Working by laser beam, e.g. welding, cutting or boring
02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
03Observing, e.g. monitoring, the workpiece
034Observing the temperature of the workpiece
B23K 26/0622
BPERFORMING OPERATIONS; TRANSPORTING
23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
26Working by laser beam, e.g. welding, cutting or boring
02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
06Shaping the laser beam, e.g. by masks or multi-focusing
062by direct control of the laser beam
0622by shaping pulses
Déposants
  • CYMER, INC. [US/US]; 17075 Thornmint Court San Diego, CA 92127-2413, US (AllExceptUS)
  • HOFMANN, Thomas [DE/US]; US (UsOnly)
Inventeurs
  • HOFMANN, Thomas; US
Mandataires
  • HILLMAN, Matthew, K.; Cymer, Inc. Legal Dept., Ms/4-2c 17075 Thornmint Court San Diego, CA 92127-2413, US
Données relatives à la priorité
11/447,37905.06.2006US
11/805,59623.05.2007US
Langue de publication anglais (EN)
Langue de dépôt anglais (EN)
États désignés
Titre
(EN) DEVICE AND METHOD TO CREATE A LOW DIVERGENCE, HIGH POWER LASER BEAM FOR MATERIAL PROCESSING APPLICATIONS
(FR) DISPOSITIF ET PROCÉDÉ DE GÉNÉRATION D'UN FAISCEAU LASER À FAIBLE DIVERGENCE ET HAUTE PUISSANCE DESTINÉ À DES APPLICATIONS DE TRAITEMENT DE MATÉRIAUX
Abrégé
(EN)
A thin beam laser crystallization apparatus for selectively melting a film deposited on a substrate is disclosed having a laser source producing a pulsed laser output beam, the source having an oscillator comprising a convex reflector and a piano output coupler; and an optical arrangement focusing the beam in a first axis and spatially expanding the beam in a second axis to produce a line beam for interaction with the film.
(FR)
Appareil de cristallisation par mince faisceau laser destiné à la fusion sélective d'un film déposé sur la surface d'un substrat et comprenant une source laser qui génère un faisceau de sortie laser pulsé, ladite source étant munie d'un oscillateur qui comporte un réflecteur convexe et un coupleur de sortie plano; et un ensemble optique destiné à la concentration du faisceau dans un premier axe et à son extension spatialement dans un deuxième axe pour générer un faisceau linéaire destiné au film.
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