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Paramétrages

1. WO2003001559 - COMPOSANTS RESISTANTS A L'EROSION POUR DES CHAMBRES DE PROCEDE PLASMA

Numéro de publication WO/2003/001559
Date de publication 03.01.2003
N° de la demande internationale PCT/US2002/020096
Date du dépôt international 24.06.2002
Demande présentée en vertu du Chapitre 2 11.11.2002
CIB
H01J 37/32 2006.01
HÉLECTRICITÉ
01ÉLÉMENTS ÉLECTRIQUES FONDAMENTAUX
JTUBES À DÉCHARGE ÉLECTRIQUE OU LAMPES À DÉCHARGE ÉLECTRIQUE
37Tubes à décharge pourvus de moyens permettant l'introduction d'objets ou d'un matériau à exposer à la décharge, p.ex. pour y subir un examen ou un traitement
32Tubes à décharge en atmosphère gazeuse
CPC
H01J 37/32467
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes, ; e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
32431Constructional details of the reactor
32458Vessel
32467Material
H01J 37/32477
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes, ; e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
32431Constructional details of the reactor
32458Vessel
32477characterised by the means for protecting vessels or internal parts, e.g. coatings
Y10T 428/12576
YSECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
10TECHNICAL SUBJECTS COVERED BY FORMER USPC
TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
428Stock material or miscellaneous articles
12All metal or with adjacent metals
12493Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
12535with additional, spatially distinct nonmetal component
12576Boride, carbide or nitride component
Y10T 428/1259
YSECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
10TECHNICAL SUBJECTS COVERED BY FORMER USPC
TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
428Stock material or miscellaneous articles
12All metal or with adjacent metals
12493Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
12535with additional, spatially distinct nonmetal component
12583Component contains compound of adjacent metal
1259Oxide
Y10T 428/12736
YSECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
10TECHNICAL SUBJECTS COVERED BY FORMER USPC
TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
428Stock material or miscellaneous articles
12All metal or with adjacent metals
12493Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
12736Al-base component
Déposants
  • APPLIED MATERIALS, INC. [US/US]; P.O. Box 450A Santa Clara, CA 95052, US
Inventeurs
  • KAUSHAL, Tony, S.; US
  • WANG, You; US
  • KUMAR, Ananda, H.; US
Mandataires
  • BERNADICOU, Michael, A. ; Blakely, Sokoloff, Taylor & Zafman LLP 7th floor 12400 Wilshire Boulevard Los Angeles, CA 90025, US
Données relatives à la priorité
09/892,21225.06.2001US
Langue de publication anglais (EN)
Langue de dépôt anglais (EN)
États désignés
Titre
(EN) EROSION-RESISTANT COMPONENTS FOR PLASMA PROCESS CHAMBERS
(FR) COMPOSANTS RESISTANTS A L'EROSION POUR DES CHAMBRES DE PROCEDE PLASMA
Abrégé
(EN)
An erosion-resistant article for use as a component in plasma process chamber. The erosion-resistant article comprises a support and an oxide coating comprising yttrium, which is disposed over the support. The support and the oxide coating preferably have material compositions that differ from one another in coefficient of thermal expansion by no more than 5x10?-6¿/K. Preferred oxide coating compositions include yttria and yttrium aluminum garnet. Preferred supports include alumina supports and aluminum-silicon carbide supports.
(FR)
L'invention concerne un article résistant à l'érosion utilisé comme composant dans une chambre de procédé plasma. L'article résistant à l'érosion comprend un support et une couche d'oxyde comprenant de l'yttrium disposée sur le support. Le support et la couche d'oxyde sont constitués de préférence de compositions de matières qui diffèrent l'une de l'autre en coefficient d'expansion thermique, cette différence ne dépassant pas 5x10-6/K. Les compositions de couche d'oxyde préférées contiennent de l'oxyde d'yttrium et du grenat d'yttrium-aluminium. Les supports préférés contiennent des supports d'alumine et des supports de carbure d'aluminium et de silicium.
Également publié en tant que
RU2004107088
Dernières données bibliographiques dont dispose le Bureau international