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1. WO1999003049 - PROCEDE D'ACQUISITION DE DONNEES INTELLIGENTE DANS UN SYSTEME DE MESURE

Note: Texte fondé sur des processus automatiques de reconnaissance optique de caractères. Seule la version PDF a une valeur juridique

[ EN ]

WHAT IS CLAIMED IS:
1. A method for intelligent data acquisition in a measurement system, comprising:
(a) providing a measurement system;
(b) performing a measurement with the measurement system, thereby obtaining a measurement result;
(c) writing the measurement result to a data file on a first storage device;
(d) repeating steps (b) and (c) one or more times, thereby accumulating a plurality of measurement results in the data file;
(e) generating one or more summary values from the measurement results;
(f) saving the one or more summary values to a summary file on the first storage device or on a second storage device;
(g) comparing at least one of the one or more summary values with a respective predefined standard summary value corresponding to the at least one summary value, wherein the comparing is made on the basis of a predefined inequality for each summary value being compared;
(h) saving the data file to the first storage device, the second storage device, or a third storage device if one or more of the at least one summary values compared in step (g) is outside of an acceptable range as defined by the respective inequalities, and/or optionally, when a trigger indicates that a condition is present.

2. The method for intelligent data acquisition according to claim 1, further comprising the step of:
(i) repeating steps (b) through (h) one or more times n for n additional data files.

3. The method for intelligent data acquisition according to claim 1, wherein the summary file is closed and a new summary file is opened after a predefined interval of time.

4. The method for intelligent data acquisition according to claim 1, wherein the measurement system is an absorption spectroscopy measurement system.

5. The method for intelligent data acquisition according to claim 4, wherein the measurement result is concentration of a molecular gas phase species.

6. The method for intelligent data acquisition according to claim 5, wherein the molecular gas phase species is water vapor.

7. The method for intelligent data acquisition according to claim 1, wherein the sample region is located in a process chamber of or an exhaust line of a semiconductor processing tool.

8. The method for intelligent data acquisition according to claim 1, wherein the measurement system is an absorption spectroscopy measurement system.

9. The method for intelligent data acquisition according to claim 8, wherein the measurement result is concentration of a molecular gas phase species.

10. The method for intelligent data acquisition according to claim 1, wherein the data file is saved in step (h) when the trigger indicates that the semiconductor processing tool is in process.

11. A method for intelligent data acquisition in a measurement system, comprising:
(a) providing a measurement system for performing an in-situ measurement of a gas phase molecular species in a gas passing through a sample region;
(b) measuring an absorption for the molecular species and calculating a concentration thereof with the measurement system;
(c) writing the concentration to a data file on a first storage device;
(d) repeating steps (b) and (c) one or more times, thereby accumulating a plurality of concentration results in the data file;
(e) generating one or more summary values from the concentration results;
(f) saving the one or more summary values to a summary file on the first storage device or on a second storage device;
(g) comparing at least one of the one or more summary values with a respective predefined standard summary value corresponding to the at least one summary value, wherein the comparing is made on the basis of a predefined inequality for each summary value being compared;
(h) saving the data file to the first storage device, the second storage device, or a third storage device if one or more of the at least one summary values compared in step (g) is outside of an acceptable range as defined by the respective inequalities, and/or optionally, when a trigger indicates that a condition is present.

12. The method for intelligent data acquisition according to claim 11, further comprising the step of:
(i) repeating steps (b) through (h) one or more times n for n additional data files.

13. The method for intelligent data acquisition according to claim 11, wherein the summary file is closed and a new summary file is opened after a predefined interval of time.

14. The method for intelligent data acquisition according to claim 11, wherein the molecular gas phase species is water vapor.

15. The method for intelligent data acquisition according to claim 11, wherein the sample region is located in a process chamber of or an exhaust line of a semiconductor processing tool.

16. The method for intelligent data acquisition according to claim 11, wherein the data file is saved in step (h) when the trigger indicates that the semiconductor processing tool is in process.