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1. MYPI 20032698 - MONOLITHIC SPUTTERING TARGET ASSEMBLY

Office
Malaisie
Numéro de la demande PI 20032698
Date de la demande 18.07.2003
Numéro de publication PI 20032698
Date de publication 19.01.2004
Type de publication A
Déposants CABOT CORPORATION
Inventeurs ROBERT B. FORD
CHRISTOPHER A. MICHALUK
Mandataires WONG SAI FONG
Données relatives à la priorité 60/397,418 19.07.2002 US
Titre
(EN) MONOLITHIC SPUTTERING TARGET ASSEMBLY
Abrégé
(EN) A MONOLITHIC SPUTTERING TARGET ASSEMBLY HAVING A ONE PIECE ASSEMBLY MADE FROM THE SAME MATERIAL IS DISCLOSED. ALSO DISCLOSED ARE OTHER SPUTTERING TARGET ASSEMBLIES WHICH HAVE A BACKING PLATE AND A SPUTTERING TARGET BLANK WHEREIN THE BACKING PLATE IS MADE FROM OR CONTAINS A METAL, SUCH AS A VALVE METAL, COBALT, TITANIUM, OR ALLOYS THEREOF. METHODS OF RECYCLING TARGET ASSEMBLIES ARE FURTHER DISCLOSED AS WELL AS UNIQUE METHODS OF PROVIDING TARGET ASSEMBLIES TO FABRICATORS.