(EN) A MONOLITHIC SPUTTERING TARGET ASSEMBLY HAVING A ONE PIECE ASSEMBLY MADE FROM THE SAME MATERIAL IS DISCLOSED. ALSO DISCLOSED ARE OTHER SPUTTERING TARGET ASSEMBLIES WHICH HAVE A BACKING PLATE AND A SPUTTERING TARGET BLANK WHEREIN THE BACKING PLATE IS MADE FROM OR CONTAINS A METAL, SUCH AS A VALVE METAL, COBALT, TITANIUM, OR ALLOYS THEREOF. METHODS OF RECYCLING TARGET ASSEMBLIES ARE FURTHER DISCLOSED AS WELL AS UNIQUE METHODS OF PROVIDING TARGET ASSEMBLIES TO FABRICATORS.
