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1. IN44/DELNP/2009 - METHOD OF MANUFACTURING MEMS DEVICES PROVIDING AIR GAP CONTROL

Office
Inde
Numéro de la demande 44/DELNP/2009
Date de la demande 02.01.2009
Numéro de publication 44/DELNP/2009
Date de publication 12.06.2009
Type de publication A
CIB
B81B 3/00
BTECHNIQUES INDUSTRIELLES; TRANSPORTS
81TECHNOLOGIE DES MICROSTRUCTURES
BDISPOSITIFS OU SYSTÈMES À MICROSTRUCTURE, p.ex. DISPOSITIFS MICROMÉCANIQUES
3Dispositifs comportant des éléments flexibles ou déformables, p.ex. comportant des membranes ou des lamelles élastiques
Déposants QUALCOMM MEMS TECHNOLOGIES, INC.,
Inventeurs TUNG MING-HAU
KOGUT LIOR
Données relatives à la priorité 11478702 30.06.2006 US
Titre
(EN) METHOD OF MANUFACTURING MEMS DEVICES PROVIDING AIR GAP CONTROL
Abrégé
(EN)
Methods and apparatus are provided for controlling a depth of a cavity between two layers of a light modulating device. A method of making a light modulating device includes providing a substrate, forming a sacrificial layer over at least a portion of the substrate, forming a reflective layer over at least a portion of the sacrificial layer, and forming one or more flexure controllers over the substrate, the flexure controllers configured so as to operably support the reflective layer and to form cavities, upon removal of the sacrificial layer, of a depth measurably different than the thickness of the sacrificial layer, wherein the depth is measured perpendicular to the substrate.