(EN) Foreign substances are effectively prevented from attaching to a stored substrate in accordance with the usage environment. Disclosed is a substrate storing device (100) which is provided with an air supplying section (110) for introducing outside air into the substrate storing device (100), an exhaust section (120) disposed opposite the air supplying section, a substrate mounting plate (140) which is disposed between the air supplying section and the exhaust section and which has a communication hole (142) for connecting the air supplying section and the exhaust section, an air supplying filter (112) disposed on the air supplying section, and a fan (122) which is disposed on the air supplying section or the exhaust section, wherein a mounting hole (150) is detachably attached with at least one or a combination of two or more of the following: a state sensor which detects the state within the substrate storing device (100), a particle charging unit, and a temperature control unit (figure 2).
(ZH)
本发明提供一种基板收纳装置。该基板收纳装置根据使用环境有效地防止异物附着在被收纳的基板上。基板收纳装置包括：供气部（110），其用于向基板收纳装置（100）内引入外部空气；排气部（120），其与供气部相对配置；基板载置板（140），其设在供气部与排气部之间，具有连通该供气部和该排气部的连通孔（142）；供气过滤器（112），其设在供气部；鼓风机（122），其设在供气部或排气部，该基板收纳装置将状态传感器、微粒带电装置和调温装置中的任一个或状态传感器、微粒带电装置和调温装置中的两个以上的组合装卸自如地设于安装孔（150），该状态传感器用于检测基板收纳装置（100）内的状态（图2）。
