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1. CN102714169 - Substrate storing device

Office
Chine
Numéro de la demande 201180006564.0
Date de la demande 21.02.2011
Numéro de publication 102714169
Date de publication 03.10.2012
Type de publication A
CPC
H01L 21/67359
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
673using specially adapted carriers ; or holders; Fixing the workpieces on such carriers or holders
6735Closed carriers
67359specially adapted for containing masks, reticles or pellicles
H01L 21/67393
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
673using specially adapted carriers ; or holders; Fixing the workpieces on such carriers or holders
6735Closed carriers
67389characterised by atmosphere control
67393characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl
Y10T 137/86035
YSECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
10TECHNICAL SUBJECTS COVERED BY FORMER USPC
TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
137Fluid handling
8593Systems
85978With pump
86035Combined with fluid receiver
B65D 85/00
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
DCONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
85Containers, packaging elements or packages, specially adapted for particular articles or materials
G03F 1/82
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR;
1Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
68Preparation processes not covered by groups G03F1/20 - G03F1/50
82Auxiliary processes, e.g. cleaning or inspecting
H01L 21/673
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
673using specially adapted carriers ; or holders; Fixing the workpieces on such carriers or holders
Déposants Tokyo Electron Ltd.
Inventeurs Moriya Tsuyoshi
Mandataires liu xinyu zhang huihua
Données relatives à la priorité 2010048380 04.03.2010 JP
Titre
(EN) Substrate storing device
(ZH) 基板收纳装置
Abrégé
(EN) Foreign substances are effectively prevented from attaching to a stored substrate in accordance with the usage environment. Disclosed is a substrate storing device (100) which is provided with an air supplying section (110) for introducing outside air into the substrate storing device (100), an exhaust section (120) disposed opposite the air supplying section, a substrate mounting plate (140) which is disposed between the air supplying section and the exhaust section and which has a communication hole (142) for connecting the air supplying section and the exhaust section, an air supplying filter (112) disposed on the air supplying section, and a fan (122) which is disposed on the air supplying section or the exhaust section, wherein a mounting hole (150) is detachably attached with at least one or a combination of two or more of the following: a state sensor which detects the state within the substrate storing device (100), a particle charging unit, and a temperature control unit (figure 2).
(ZH)

本发明提供一种基板收纳装置。该基板收纳装置根据使用环境有效地防止异物附着在被收纳的基板上。基板收纳装置包括:供气部(110),其用于向基板收纳装置(100)内引入外部空气;排气部(120),其与供气部相对配置;基板载置板(140),其设在供气部与排气部之间,具有连通该供气部和该排气部的连通孔(142);供气过滤器(112),其设在供气部;鼓风机(122),其设在供气部或排气部,该基板收纳装置将状态传感器、微粒带电装置和调温装置中的任一个或状态传感器、微粒带电装置和调温装置中的两个以上的组合装卸自如地设于安装孔(150),该状态传感器用于检测基板收纳装置(100)内的状态(图2)。