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1. CN101970315 - Methods and apparatuses for controlling contamination of substrates

Office Chine
Numéro de la demande 200880126995.9
Date de la demande 18.12.2008
Numéro de publication 101970315
Date de publication 09.02.2011
Numéro de délivrance 101970315
Date de délivrance 15.05.2013
Type de publication B
CIB
B65D 85/86
BTECHNIQUES INDUSTRIELLES; TRANSPORTS
65MANUTENTION; EMBALLAGE; EMMAGASINAGE; MANIPULATION DES MATÉRIAUX DE FORME PLATE OU FILIFORME
DRÉCEPTACLES POUR L'EMMAGASINAGE OU LE TRANSPORT D'OBJETS OU DE MATÉRIAUX, p.ex. SACS, TONNEAUX, BOUTEILLES, BOÎTES, BIDONS, CAISSES, BOCAUX, RÉSERVOIRS, TRÉMIES OU CONTENEURS D'EXPÉDITION; ACCESSOIRES OU FERMETURES POUR CES RÉCEPTACLES; ÉLÉMENTS D'EMBALLAGE; PAQUETS
85Réceptacles, éléments d'emballage ou paquets spécialement adaptés aux objets ou aux matériaux particuliers
86pour des éléments électriques
CPC
H01L 21/67769
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
677for conveying, e.g. between different workstations
67763the wafers being stored in a carrier, involving loading and unloading
67769Storage means
H01L 21/67017
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
67005Apparatus not specifically provided for elsewhere
67011Apparatus for manufacture or treatment
67017Apparatus for fluid treatment
Déposants Entegris Inc.
诚实公司
Inventeurs Kishkovich Oleg P.
奥列格·P·基什科维奇
Halbmaier David L.
大卫·L·哈尔布迈尔
Grayfer Anatoly
阿纳托利·格雷费尔
Mandataires gu jinwei wang chunwei
北京集佳知识产权代理有限公司 11227
北京集佳知识产权代理有限公司 11227
Données relatives à la priorité 61/014,709 18.12.2007 US
Titre
(EN) Methods and apparatuses for controlling contamination of substrates
(ZH) 用于控制衬底污染的方法和设备
Abrégé
(EN)
Components, systems, and methods for maintaining an extremely dry environment within substrate containers formed of polymers provides supplemental exterior gas washing of the substrate container to minimize permeation of moisture and oxygen through the polymer walls of the container and to control desorption of water entrapped in the polymer walls of the container.

(ZH)

用于在由聚合物形成的衬底容器中保持极其干燥的环境的组件、系统和方法,其提供清洗衬底容器的补充外部气体,以使经过容器的聚合物壁发生的水分和氧渗透最小化并控制容器的聚合物壁中夹带的水的脱附。

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