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1. CN101919304 - Heater block of rapid thermal process apparatus

Office Chine
Numéro de la demande 200880118079.0
Date de la demande 01.12.2008
Numéro de publication 101919304
Date de publication 15.12.2010
Type de publication A
CIB
H05B 3/06
HÉLECTRICITÉ
05TECHNIQUES ÉLECTRIQUES NON PRÉVUES AILLEURS
BCHAUFFAGE ÉLECTRIQUE; ÉCLAIRAGE ÉLECTRIQUE NON PRÉVU AILLEURS
3Chauffage par résistance ohmique
02Détails
06Eléments chauffants combinés constructivement avec des éléments d'accouplement ou avec des supports
CPC
H01L 21/67115
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
67005Apparatus not specifically provided for elsewhere
67011Apparatus for manufacture or treatment
67098Apparatus for thermal treatment
67115mainly by radiation
H05B 3/0033
HELECTRICITY
05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
BELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR
3Ohmic-resistance heating
0033Heating devices using lamps
Déposants Kornic Systems Corp.
AP系统股份有限公司
Inventeurs Shim Jang-woo
沈长禹
Kim Seung-yong
金昇龙
Her Jun
许俊
Hwang Dae-cheon
黄大天
Mandataires chen yangdun
北京鸿元知识产权代理有限公司 11327
Données relatives à la priorité 1020070124435 03.12.2007 KR
Titre
(EN) Heater block of rapid thermal process apparatus
(ZH) 快速热处理装置的加热器单元
Abrégé
(EN)
Disclosed is a separation type heater block of a rapid thermal processing apparatus, including a lamp housing formed in a plate shape, and provided with a plurality of lamp insertion holes, into which heating lamps are respectively inserted; a socket housing, into which sockets of the heating lamps are inserted, separably covered on the lamp housing; and a reflector housing provided with light emission holes at positions corresponding to the lamp insertion holes, separably installed under the lamp housing such that lower ends of the heating lamps are respectively inserted into the light emission holes, side walls of the light emission holes serving as barriers, wherein a cooling water channel, through which cooling water flows, is formed through the side walls of the light emission holes of the reflector housing.

(ZH)

本发明公开了一种快速热处理装置的分离型加热器单元,包括:灯罩,所述灯罩形成为平板形状,并且所述灯罩设置有多个插灯孔,加热灯分别插入所述插灯孔中;插座罩,所述加热灯的插座插入所述插座罩中,所述插座罩可分离地覆盖在所述灯罩上;以及反射器罩,所述反射器罩在与所述插灯孔相对应的位置设置有出光孔,所述反射器罩可分离地安装在所述灯罩的下面,从而使得所述加热灯的下端分别插入所述出光孔中,所述出光孔的侧壁用作挡板,其中,冷却水流过的冷却水槽穿过所述反射器罩的所述出光孔的侧壁形成。