(EN)
A method to form a vertical waveguide taper in a planar waveguide includes providing a substrate (10), forming a cladding layer (12) or the substrate, forming a core layer (14) on the cladding layer (12) . A protective layer (16B) with an opening is formed on the core layer (14), the opening exposing a portion of the core layer. A chemical mechanical polishing process is performed so that dishing occurs in the exposed portion, forming a depression (31) , in the core (14) with a sloped sidewall. In one embodiment, the core layer (14) is then patterned so that a portion of the core layer is removed to about the depth of the depression. This removed portion includes a part of the core layer containing the depression. The resulting structure includes an unetched sloped surface that transitions to a substantially planar etched surface. The core layer is patterned and etched again to form the waveguide, with the sloped surface forming part of the taper.
(ZH) 一种用于在平面波导中形成垂直波导锥形体的方法包括：提供基板(10)；在基板上形成覆盖层(12)；在覆盖层(12)上形成核心层(14)。在核心层(14)上形成具有开口的保护层(16B)，该开口露出一部分核心层。使用化学机械抛光工艺从而，在暴露部分中形成凹坑，在核心层(14)中形成具有倾斜侧壁的凹坑(31)。在一个实施例中，随后，将核心层(14)形成图案，从而将一部分核心层除去到约凹坑的深度。该被除去的部分包括含凹坑的一部分核心层。最终的结构包括未被蚀刻的倾斜表面，它过度到基本平面的被蚀刻表面。再次使核心层形成图案并被蚀刻以形成波导，其中倾斜表面形成锥形体的一部分。
