(EN)
A rotary type CVD film forming apparatus for mass production, wherein a film forming chamber is formed by providing one columnar body having a plurality of housing spaces for housing one plastic container each in one said housing space, a plurality of said film forming chambers is arranged on a rotation support body at equal intervals in a circular state, source gas introduction means serving as an external electrode which introduce a source gas that is converted to plasma inside the plastic containers housed in each of said film forming chambers is provided, and high frequency supply means which supply a high frequency to the external electrode of each of said film forming chambers is provided to form a CVD (chemical vapor growing) film on the internal surfaces of said plastic containers.
(ZH) 本发明的目的是提供一种旋转型的批量生产用CVD成膜装置，其中高频电源和匹配箱的数量比成膜室的数量少。该装置设有多个柱状体形状的成膜室，该成膜室的每一个中均收容着1个塑料容器；将该成膜室以圆周状、按均等的间隔配置在旋转支承体上；设有通过兼作内部电极的原料气体供给管对收容于各成膜室中的容器的内部导入等离子体的原料气体的原料气体导入装置；设有对兼作各成膜室的一部分的外部电极供给高频能量的高频能量供给装置。
