(EN) A method of inspecting a sample at high speed includes directing and focusing radiation onto a sample, and receiving radiation from the sample and directing received radiation to an image sensor. Notably, the method includes driving the image sensor with predetermined signals. The predetermined signals minimize a settling time of an output signal of the image sensor. The predetermined signals are controlled by a phase accumulator, which is used to select look-up values. The driving can further include loading an initial phase value, selecting most significant bits of the phase accumulator, and converting the look-up values to an analog signal. In one embodiment, for each cycle of a phase clock, a phase increment can be added to the phase accumulator. The driving can be performed by a custom waveform generator.
(ZH) 本发明揭示一种高速检验样本的方法，所述方法包含：将辐射引导且聚焦到样本上；及接收来自所述样本的辐射且将所接收到的辐射引导到图像传感器。所述方法尤其包含使用预定信号驱动所述图像传感器。所述预定信号最小化所述图像传感器的输出信号的安定时间。所述预定信号由用于选择查找值的相位累加器控制。所述驱动可进一步包含加载初始相位值，选择所述相位累加器的最高有效位及将所述查找值转换为模拟信号。在一个实施例中，针对相位时钟的每一循环，可将相位增量添加到所述相位累加器。所述驱动可由定制波形产生器执行。