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1. AU1998079806 - Method for intelligent data acquisition in a measurement system

Office Australie
Numéro de la demande 79806/98
Date de la demande 22.06.1998
Numéro de publication 1998079806
Date de publication 25.03.1999
Type de publication A
CIB
H01L 21/02
HÉLECTRICITÉ
01ÉLÉMENTS ÉLECTRIQUES FONDAMENTAUX
LDISPOSITIFS À SEMI-CONDUCTEURS; DISPOSITIFS ÉLECTRIQUES À L'ÉTAT SOLIDE NON PRÉVUS AILLEURS
21Procédés ou appareils spécialement adaptés à la fabrication ou au traitement de dispositifs à semi-conducteurs ou de dispositifs à l'état solide, ou bien de leurs parties constitutives
02Fabrication ou traitement des dispositifs à semi-conducteurs ou de leurs parties constitutives
G01N 21/27
GPHYSIQUE
01MÉTROLOGIE; TESTS
NRECHERCHE OU ANALYSE DES MATÉRIAUX PAR DÉTERMINATION DE LEURS PROPRIÉTÉS CHIMIQUES OU PHYSIQUES
21Recherche ou analyse des matériaux par l'utilisation de moyens optiques, c. à d. en utilisant des rayons infrarouges, visibles ou ultraviolets
17Systèmes dans lesquels la lumière incidente est modifiée suivant les propriétés du matériau examiné
25Couleur; Propriétés spectrales, c. à d. comparaison de l'effet du matériau sur la lumière pour plusieurs longueurs d'ondes ou plusieurs bandes de longueurs d'ondes différentes
27en utilisant la détection photo-électrique
G06F 17/40
GPHYSIQUE
06CALCUL; COMPTAGE
FTRAITEMENT ÉLECTRIQUE DE DONNÉES NUMÉRIQUES
17Équipement ou méthodes de traitement de données ou de calcul numérique, spécialement adaptés à des fonctions spécifiques
40Acquisition et consignation de données
H01L 21/66
HÉLECTRICITÉ
01ÉLÉMENTS ÉLECTRIQUES FONDAMENTAUX
LDISPOSITIFS À SEMI-CONDUCTEURS; DISPOSITIFS ÉLECTRIQUES À L'ÉTAT SOLIDE NON PRÉVUS AILLEURS
21Procédés ou appareils spécialement adaptés à la fabrication ou au traitement de dispositifs à semi-conducteurs ou de dispositifs à l'état solide, ou bien de leurs parties constitutives
66Test ou mesure durant la fabrication ou le traitement
CPC
G01N 21/39
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
39using tunable lasers
G01N 21/3554
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
35using infra-red light
3554for determining moisture content
G01N 2015/0046
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
15Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
0042Investigating dispersion of solids
0046in gas, e.g. smoke
G01N 2021/354
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
35using infra-red light
3504for analysing gases, e.g. multi-gas analysis
354Hygrometry of gases
G01N 2021/399
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
39using tunable lasers
396Type of laser source
399Diode laser
Déposants L'Air Liquide, Societe Anonyme pour l'Etude et l'Exploitation des Procedes Georges Claude
Inventeurs McAndrew, James J. F.
Données relatives à la priorité 08893539 11.07.1997 US
Titre
(EN) Method for intelligent data acquisition in a measurement system
Abrégé
(EN)
Provided is a novel method for intelligent data acquisition in a measurement system. The method comprises the following steps: (a) providing a measurement system; (b) performing a measurement with the measurement system, thereby obtaining a measurement result; (c) writing the measurement result to a data file on a first storage device; (d) repeating steps (b) and (c) one or more times, thereby accumulating a plurality of measurement results in the data file; (e) generating one or more summary values from the measurement results; (f) saving the one or more summary values to a summary file on the first storage device or on a second storage device; (g) comparing at least one of the one or more summary values with a respective predefined standard summary value corresponding to the at least one summary value, wherein the comparing is made on the basis of a predefined inequality for each summary value being compared; and (h) saving the data file to the first storage device, the second storage device, or a third storage device if one or more of the at least one summary values compared in step (g) is outside of an acceptable range as defined by the respective inequalities, and/or optionally, when a trigger indicates that a condition is present. Particular applicability is found in in-situ moisture concentration measurement in a semiconductor processing apparatus.

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