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1. WO2020159805 - SYSTÈME ET PROCÉDÉ D'INSPECTION UTILISANT UNE DÉCOMPOSITION DE TENSEUR ET UNE DÉCOMPOSITION DE VALEUR SINGULIÈRE

Note: Texte fondé sur des processus automatiques de reconnaissance optique de caractères. Seule la version PDF a une valeur juridique

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CLAIMS

What is claimed:

1 . A sample characterization system, comprising:

a controller communicatively coupled to an inspection sub-system, the controller including one or more processors configured to execute a set of program instructions stored in memory, the set of program instructions configured to cause the one or more processors to:

acquire one or more target image frames of a sample;

generate a target tensor with the one or more acquired target image frames; perform a first set of one or more decomposition processes on the target tensor to form generate one or more reference tensors including one or more reference image frames;

identify one or more differences between the one or more target image frames and the one or more reference image frames; and

determine one or more characteristics of the sample based on the one or more identified differences.

2. The system of Claim 1 , wherein the first set of one or more decomposition processes comprise a Tucker decomposition process.

3. The system of Claim 2, wherein the Tucker decomposition process comprises a multilinear singular value decomposition process.

4. The system of Claim 1 , wherein the controller is configured to perform the first set of one or more decomposition processes on the target tensor using a first orthonormal basis vector for a column space of the target tensor, a second orthonormal basis vector for a row space of the target tensor, and a third orthonormal basis vector for a stack space of the target tensor.

5. The system of Claim 1 , wherein the controller is configured to generate the one or more reference tensors by:

performing one or more low-rank approximations of a core tensor used to carry out the one or more decomposition processes.

6. The system of Claim 5, wherein the controller is configured to perform the one or more low-rank approximations by truncating at least a portion of the core tensor.

7. The system of Claim 5, wherein the controller is configured to perform the one or more low-rank approximations by truncating one or more orthonormal basis vectors used for the one or more decomposition processes.

8. The system of Claim 1 , wherein the one or more identified characteristics comprise a defect of the sample.

9. The system of Claim 1 , wherein the controller is further configured to:

generate one or more control signals configured to selectively adjust one or more characteristics of one or more process tools based on the one or more determined characteristics.

10. The system of Claim 1 , wherein the controller is further configured to:

perform a second set of one or more decomposition processes on the target tensor to form a de-noised core tensor; and

perform one or more high-rank approximations on the de-noised core tensor to generate a de-noised target tensor, the de-noised target tensor including one or more de-noised target image frames.

1 1 .The system of Claim 10, wherein the controller is further configured to:

identify one or more differences between the one or more de-noised target image frames and the one or more reference image frames; and

determine one or more characteristics of the sample based on the one or more identified differences.

12. A method for characterizing a sample, comprising:

acquiring one or more target image frames of a sample;

generating a target tensor with the one or more acquired target image frames; performing a first set of one or more decomposition processes on the target tensor to generate one or more reference tensors including one or more reference image frames; identifying one or more differences between the one or more target image frames and the one or more reference image frames; and

determining one or more characteristics of the sample based on the one or more identified differences.

13. The method of Claim 12, wherein the first set of one or more decomposition processes comprise a Tucker decomposition process.

14. The method of Claim 13, wherein the Tucker decomposition process comprises a multilinear singular value decomposition process.

15. The method of Claim 12, wherein performing the first set of one or more decomposition processes on the target tensor comprises:

performing the first set of one or more decomposition processes on the target tensor using a first orthonormal basis vector for a row space of the target tensor, a second orthonormal basis vector for a column space of the target tensor, and a third orthonormal basis vector for a stack space of the target tensor.

16. The method of Claim 12, wherein generating one or more reference tensors including one or more reference image frames based on a core tensor comprises:

performing one or more low-rank approximations of the core tensor used to carry out the one or more decomposition processes.

17. The method of Claim 16, wherein performing one or more low-rank approximations of the core tensor comprises:

truncating at least a portion of the core tensor.

18. The method of Claim 16, wherein performing one or more low-rank approximations of the core tensor comprises:

truncating one or more orthonormal basis vectors used for the one or more decomposition processes.

19. The method of Claim 12, wherein the one or more identified characteristics comprise a defect of the sample.

20. The method of Claim 12, further comprising:

generating one or more control signals configured to selectively adjust one or more characteristics of one or more process tools based on the one or more determined characteristics.

21 . The method of Claim 12, further comprising:

performing a second set of one or more decomposition processes on the target tensor to form a de-noised core tensor; and

performing one or more high-rank approximations on the de-noised core tensor to generate a de-noised target tensor, the de-noised target tensor including one or more de-noised target image frames.

22. The method of Claim 21 , further comprising:

identifying one or more differences between the one or more de-noised target image frames and the one or more reference image frames; and

determining one or more characteristics of the sample based on the one or more identified differences.

23. A sample characterization system, comprising:

a controller communicatively coupled to an inspection sub-system, the controller including one or more processors configured to execute a set of program instructions stored in memory, the set of program instructions configured to cause the one or more processors to:

acquire one or more difference image frames of a sample, the one or more difference image frames based on one or more target image frames and one or more reference image frames;

generate one or more stacked difference images with the one or more acquired difference image frames;

perform a set of one or more singular value decomposition (SVD) processes on the one or more stacked difference images to form a set of one or more singular vectors;

selectively modify at least one singular vector of the set of one or more singular vectors to generate a modified set of one or more singular vectors;

generate a modified stacked difference image based on the modified set of one or more singular vectors; and

determine one or more characteristics of the sample based on the modified stacked difference image.

24. The system of Claim 23, wherein the controller is configured to determine one or more characteristics of the sample based on a gray level of one or more pixels of the modified stacked difference image.

25. The system of Claim 23, wherein the controller is configured to selectively modify at least one singular vector of the set of one or more singular vectors by:

truncating a first k number of singular vectors of the first set of one or more singular vectors.

26. The system of Claim 25, wherein k is determined according to the equation k
wherein s2 comprises a variance value of the one or more stacked difference images and K comprises an empirically determined constant.

27. The system of Claim 23, wherein the one or more identified characteristics comprise a defect of the sample.

28. The system of Claim 23, wherein the controller is further configured to:

generate one or more control signals configured to selectively adjust one or more characteristics of one or more process tools based on the one or more determined characteristics.

29. A method for characterizing a sample, comprising:

acquiring one or more difference image frames of a sample, the one or more difference image frames based on one or more target image frames and one or more reference image frames;

generating one or more stacked difference images with the one or more acquired difference image frames;

performing a set of one or more singular value decomposition (SVD) processes on the one or more stacked difference images to form a set of one or more singular vectors; selectively modifying at least one singular vector of the set of one or more singular vectors to generate a modified set of one or more singular vectors;

generating a modified stacked difference image based on the modified set of one or more singular vectors; and

determining one or more characteristics of the sample based on the modified stacked difference image.