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1. WO2007102444 - PROCÉDÉ DE PRODUCTION D'ÉLECTRODES DE DIAMANT

Note: Texte fondé sur des processus automatiques de reconnaissance optique de caractères. Seule la version PDF a une valeur juridique

[ EN ]

Claims

1. A method for producing diamond electrode by coating a substrate material by CVD process;
said diamond electrode having a single and homogeneous layer composed of a poly-crystalline and conductive diamond with grain size lower than one micrometer;
said layer having a Raman quality higher than 50%; wherein the said layer is produced by controlling the CVD at pressure lower than 20mBar; and
*
at methane concentration lower than 2%.

2. The method for producing the diamond electrode according to the claim 1 , further comprises a pretreatment step before CVD process,
said step comprising a procedure where nano-sized diamonds are used as seed crystals .

3. The method for producing the diamond electrode according to the claim 1, wherein the diamond layer has a thickness of at least one micrometer.

4. The method for producing the diamond electrode according to the claim 1 , wherein the diamond layer has a boron doping level lower than 1500ppm.

5. The method for producing the diamond electrode according to the claim 1, wherein the CVD process comprises a hot-filament CVD process, where the filament are disposed vertically.