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1. WO2020160092 - GRAVURE PAR FAISCEAU D'IONS AVEC TRAITEMENT ET IMPULSION À GAZ


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INTERNATIONAL SEARCH REPORT (ISR)
Part 1:  1  2  3  4  5  6          Part 2:  A  B  C  D  E 
International application No. Applicant's or agent's file reference
PCT/US2020/015587 LAMRP440WO
International filing date (day/month/year) (Earliest) Priority Date (day/month/year)
29 January 2020 01 February 2019
Applicant
LAM RESEARCH CORPORATION
FOR FURTHER ACTION: See Form PCT/ISA/220 as well as, where applicable, item 5 below.
This international search report has been prepared by this International Searching Authority and is transmitted to the applicant according to Article 18. A copy is being transmitted to the International Bureau.
It is also accompanied by a copy of each prior art document cited in this report.
1. Basis of the report
a. With regard to the language, the international search was carried out on the basis of:
the international application in the language in which it was filed.
a translation of the international application into                                          which is the language of a translation furnished for the purposes of international search (Rules 12.3(a) and 23.1(b)).
b.
This international search report has been established taking into account the rectification of an obvious mistake authorized by or notified to this Authority under Rule 91 (Rule 43.6bis(a)).
c.
With regard to any nucleotide and/or amino acid sequence disclosed in the international application, the international search was carried out on the basis of a sequence listing filed or furnished:
2. Certain claims were found unsearchable
3. Unity of invention is lacking
4. Title of the invention
The text is approved as submitted by the applicant.
The text has been established by this Authority to read as follows:
5. Abstract
The text is approved as submitted by the applicant.
The text has been established, according to Rule 38.2, by this Authority as it appears in Box No. IV. The applicant may, within one month from the date of mailing of this international search report, submit comments to this Authority.
6. Drawings
a.
The figure of the drawings to be published with the abstract is Figure No.     5B    
as suggested by the applicant.
as selected by this Authority, because the applicant failed to suggest a figure.
as selected by this Authority, because this figure better characterizes the invention.
b.
none of the figures is to be published with the abstract.

A. CLASSIFICATION OF SUBJECT MATTER

     H01L 43/12 (2006.01)i; H01L 43/08 (2006.01)i; H01L 43/02 (2006.01)i; H01J 37/32 (2006.01)i
According to International Patent Classification (IPC) or to both national classification and IPC

B. FIELDS SEARCHED

Minimum documentation searched (classification system followed by classification symbols):
Documentation searched other than minimum documentation to the extent that such documents are included in the fields searched:
Korean utility models and applications for utility models
Japanese utility models and applications for utility models
Electronic data base consulted during the international search (name of data base and, where practicable, search terms used):
eKOMPASS(KIPO internal) & keywords: ion beam, inert gas, etching, reactive gas, magnetic random access memory, pulsing

C. DOCUMENTS CONSIDERED TO BE RELEVANT

Category* Citation of document, with indication, where appropriate, of the relevant passages Relevant to claim No.
(1)
Y
US 2015-0364349 A1 (LAM RESEARCH CORPORATION) 17 December 2015 paragraphs [0039], [0042], [0075], [0078], [0087]; claim 1; and figures 2, 5
1-36
(2)
Y
US 2016-0204342 A1 (CANON ANELVA CORPORATION) 14 July 2016 paragraphs [0043], [0069], [0083]; claim 1; and figure 5
1-36
(3)
A
KR 10-1939481 B1 (RESEARCH & BUSINESS FOUNDATION SUNGKYUNKWAN UNIVERSITY) 16 January 2019 paragraphs [0025]-[0052]; claims 1, 13; and figures 1-3
1-36
(4)
A
KR 10-1529821 B1 (RESEARCH & BUSINESS FOUNDATION SUNGKYUNKWAN UNIVERSITY) 29 June 2015 claims 1, 3-5; and figures 2-4
1-36
(5)
A
WO 2015-134137 A1 (APPLIED MATERIALS, INC.) 11 September 2015 claims 1-5; and figures 1A-1D
1-36
*
Special categories of cited documents:
"A"
document defining the general state of the art which is not considered to be of particular relevance
"D"
document cited by the applicant in the international application
"E"
earlier application or patent but published on or after the international filing date
"L"
document which may throw doubts on priority claim(s) or which is cited to establish the publication date of another citation or other special reason (as specified)
"O"
document referring to an oral disclosure, use, exhibition or other means
"P"
document published prior to the international filing date but later than the priority date claimed
"T"
later document published after the international filing date or priority date and not in conflict with the application but cited to understand the principle or theory underlying the invention
"X"
document of particular relevance; the claimed invention cannot be considered novel or cannot be considered to involve an inventive step when the document is taken alone
"Y"
document of particular relevance; the claimed invention cannot be considered to involve an inventive step when the document is combined with one or more other such documents, such combination being obvious to a person skilled in the art
"&"
document member of the same patent family

D. INFORMATION ON PATENT FAMILY MEMBERS

Patent document cited in search report Publication date
(day/month/year)
Patent family member(s) Publication date
(day/month/year)
US 2015-0364349 A1
17 December 2015
CN 104282522 A
CN 104282522 B
CN 107068559 A
JP 6475430 B2
JP 2015-019065 A
KR 10-2015-0007993 A
SG 10201403999 A
TW 201519311 A
TW I647757 B
US 10134605 B2
US 2015-0017810 A1
US 2015-0364339 A1
US 9147581 B2
US 9431269 B2
14 January 2015
18 January 2017
18 August 2017
27 February 2019
29 January 2015
21 January 2015
27 February 2015
16 May 2015
11 January 2019
20 November 2018
15 January 2015
17 December 2015
29 September 2015
30 August 2016
US 2016-0204342 A1
14 July 2016
JP 5824189 B2
JP 6078610 B2
JP 2016-012738 A
KR 10-1862632 B1
KR 10-2016-0055187 A
TW 201526321 A
TW I557959 B
US 10157961 B2
US 2017-0250221 A1
WO 2015-045205 A1
25 November 2015
08 February 2017
21 January 2016
31 May 2018
17 May 2016
01 July 2015
11 November 2016
18 December 2018
31 August 2017
02 April 2015
KR 10-1939481 B1
16 January 2019
US 2019-0035610 A1
31 January 2019
KR 10-1529821 B1
29 June 2015
None
WO 2015-134137 A1
11 September 2015
CN 106030841 A
KR 10-2016-0130484 A
TW 201537743 A
TW I661545 B
US 2015-0255507 A1
US 9564582 B2
12 October 2016
11 November 2016
01 October 2015
01 June 2019
10 September 2015
07 February 2017
Name and mailing address of the ISA/:
Korean Intellectual Property Office
189 Cheongsa-ro, Seo-gu, Daejeon Metropolitan City, 302-701
Republic of Korea
Facsimile No. +82-42-481-8578
Date of the actual completion of the international search:
19 May 2020
Date of mailing of the international search report:
20 May 2020
Authorized officer:
KIM, Sung Hoon
Telephone No. +82-42-481-8710
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