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1. WO2020163428 - ALIMENTATION EN GAZ À INJECTEURS INCLINÉS DANS UN APPAREIL DE TRAITEMENT AU PLASMA


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INTERNATIONAL SEARCH REPORT (ISR)
Part 1:  1  2  3  4  5  6          Part 2:  A  B  C  D  E 
International application No. Applicant's or agent's file reference
PCT/US2020/016717 AGX-313-PCT
International filing date (day/month/year) (Earliest) Priority Date (day/month/year)
05 February 2020 07 February 2019
Applicant
MATTSON TECHNOLOGY, INC. et al.
FOR FURTHER ACTION: See Form PCT/ISA/220 as well as, where applicable, item 5 below.
This international search report has been prepared by this International Searching Authority and is transmitted to the applicant according to Article 18. A copy is being transmitted to the International Bureau.
It is also accompanied by a copy of each prior art document cited in this report.
1. Basis of the report
a. With regard to the language, the international search was carried out on the basis of:
the international application in the language in which it was filed.
a translation of the international application into                                          which is the language of a translation furnished for the purposes of international search (Rules 12.3(a) and 23.1(b)).
b.
This international search report has been established taking into account the rectification of an obvious mistake authorized by or notified to this Authority under Rule 91 (Rule 43.6bis(a)).
c.
With regard to any nucleotide and/or amino acid sequence disclosed in the international application, the international search was carried out on the basis of a sequence listing filed or furnished:
2. Certain claims were found unsearchable
3. Unity of invention is lacking
4. Title of the invention
The text is approved as submitted by the applicant.
The text has been established by this Authority to read as follows:
5. Abstract
The text is approved as submitted by the applicant.
The text has been established, according to Rule 38.2, by this Authority as it appears in Box No. IV. The applicant may, within one month from the date of mailing of this international search report, submit comments to this Authority.
6. Drawings
a.
The figure of the drawings to be published with the abstract is Figure No.     4    
as suggested by the applicant.
as selected by this Authority, because the applicant failed to suggest a figure.
as selected by this Authority, because this figure better characterizes the invention.
b.
none of the figures is to be published with the abstract.

A. CLASSIFICATION OF SUBJECT MATTER

     H01J 37/32 (2006.01)i
According to International Patent Classification (IPC) or to both national classification and IPC

B. FIELDS SEARCHED

Minimum documentation searched (classification system followed by classification symbols):
Documentation searched other than minimum documentation to the extent that such documents are included in the fields searched:
Korean utility models and applications for utility models
Japanese utility models and applications for utility models
Electronic data base consulted during the international search (name of data base and, where practicable, search terms used):
eKOMPASS(KIPO internal) & Keywords: plasma, chamber, gas, supply, injector, angle, direction

C. DOCUMENTS CONSIDERED TO BE RELEVANT

Category* Citation of document, with indication, where appropriate, of the relevant passages Relevant to claim No.
(1)
Y
US 2017-0110292 A1 (APPLIED MATERIALS, INC.) 20 April 2017 See paragraphs 20-36, claims 9-20 and figures 1-3D.
1-20
(2)
Y
US 2018-0358208 A1 (MATTSON TECHNOLOGY, INC.) 13 December 2018 See paragraphs 6, 46-105, claims 1-10 and figures 1-15.
1-20
(3)
A
KR 10-2011-0096649 A (DMS CO., LTD.) 31 August 2011 See the entire document.
1-20
(4)
A
US 5522934 A (AKIRA SUZUKI et al.) 04 June 1996 See the entire document.
1-20
(5)
A
US 2015-0371826 A1 (APPLIED MATERIALS, INC.) 24 December 2015 See the entire document.
1-20
*
Special categories of cited documents:
"A"
document defining the general state of the art which is not considered to be of particular relevance
"D"
document cited by the applicant in the international application
"E"
earlier application or patent but published on or after the international filing date
"L"
document which may throw doubts on priority claim(s) or which is cited to establish the publication date of another citation or other special reason (as specified)
"O"
document referring to an oral disclosure, use, exhibition or other means
"P"
document published prior to the international filing date but later than the priority date claimed
"T"
later document published after the international filing date or priority date and not in conflict with the application but cited to understand the principle or theory underlying the invention
"X"
document of particular relevance; the claimed invention cannot be considered novel or cannot be considered to involve an inventive step when the document is taken alone
"Y"
document of particular relevance; the claimed invention cannot be considered to involve an inventive step when the document is combined with one or more other such documents, such combination being obvious to a person skilled in the art
"&"
document member of the same patent family

D. INFORMATION ON PATENT FAMILY MEMBERS

Patent document cited in search report Publication date
(day/month/year)
Patent family member(s) Publication date
(day/month/year)
US 2017-0110292 A1
20 April 2017
CN 104170067 B
CN 104170067 A
JP 2015-522709 A
KR 10-2015-0014468 A
TW 201411717 A
TW 201732074 A
TW 201441414 A
TW I648425 B
TW I615499 B
US 9536710 B2
US 2014-237840 A1
US 9162236 B2
US 2013-284700 A1
WO 2013-162851 A1
WO 2014-130230 A1
15 March 2017
26 November 2014
06 August 2015
06 February 2015
16 March 2014
16 September 2017
01 November 2014
21 January 2019
21 February 2018
03 January 2017
28 August 2014
20 October 2015
31 October 2013
31 October 2013
28 August 2014
US 2018-0358208 A1
13 December 2018
CN 110741459 A
KR 10-2019-0139321 A
KR 10-2019-0139322 A
KR 10-2019-0140080 A
KR 10-2019-0139324 A
TW 201903809 A
TW 201903816 A
TW 201903817 A
TW 201904357 A
US 2018-0358210 A1
US 2018-0358206 A1
US 2018-0358204 A1
WO 2018-226275 A1
WO 2018-226276 A1
WO 2018-226273 A1
WO 2018-226274 A1
31 January 2020
17 December 2019
17 December 2019
18 December 2019
17 December 2019
16 January 2019
16 January 2019
16 January 2019
16 January 2019
13 December 2018
13 December 2018
13 December 2018
13 December 2018
13 December 2018
13 December 2018
13 December 2018
KR 10-2011-0096649 A
31 August 2011
CN 102162099 B
CN 102162099 A
TW I446441 B
TW 201130041 A
US 2011-0203735 A1
26 June 2013
24 August 2011
21 July 2014
01 September 2011
25 August 2011
US 5522934 A
04 June 1996
JP 3243125 B2
JP 08-017748 A
JP 08-013169 A
JP 3276514 B2
KR 10-0300097 B1
07 January 2002
19 January 1996
16 January 1996
22 April 2002
30 November 2001
US 2015-0371826 A1
24 December 2015
CN 107221487 A
CN 104782234 A
CN 107221487 B
CN 104782234 B
JP 2016-519845 A
JP 6634475 B2
JP 6359627 B2
JP 2018-174340 A
JP 2020-061563 A
KR 10-2015-0129659 A
TW I617222 B
TW 201436650 A
TW 201817287 A
US 10163606 B2
US 2019-0122861 A1
WO 2014-149200 A1
29 September 2017
15 July 2015
28 June 2019
14 July 2017
07 July 2016
22 January 2020
18 July 2018
08 November 2018
16 April 2020
20 November 2015
01 March 2018
16 September 2014
01 May 2018
25 December 2018
25 April 2019
25 September 2014
Name and mailing address of the ISA/:
Korean Intellectual Property Office
189 Cheongsa-ro, Seo-gu, Daejeon Metropolitan City, 302-701
Republic of Korea
Facsimile No. +82-42-481-8578
Date of the actual completion of the international search:
04 June 2020
Date of mailing of the international search report:
05 June 2020
Authorized officer:
PARK, Hye Lyun
Telephone No. +82-42-481-3463
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