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1. WO2020163428 - ALIMENTATION EN GAZ À INJECTEURS INCLINÉS DANS UN APPAREIL DE TRAITEMENT AU PLASMA

Note: Texte fondé sur des processus automatiques de reconnaissance optique de caractères. Seule la version PDF a une valeur juridique

[ EN ]

WHAT IS CLAIMED IS:

1. A plasma processing apparatus, comprising:

a processing chamber having a workpiece support, the workpiece support configured to support a workpiece during plasma processing;

an inductively coupled plasma source configured to induce a plasma in a process gas in the processing chamber;

a gas supply configured to deliver the process gas to the processing chamber, the gas supply comprising one or more injectors, wherein each of the one or more injectors is angled relative to a direction parallel to a radius of the workpiece to produce a rotational gas flow relative to a direction perpendicular to a center of the workpiece.

2. The plasma processing apparatus of claim 1, wherein the gas supply is located in a ceiling of the processing chamber such that the gas supply delivers the process gas into the processing chamber from a top of the processing chamber.

3. The plasma processing apparatus of claim 1, wherein the gas supply is integrated with a side wall of the processing chamber.

4. The plasma processing apparatus of claim 3, wherein at least one injector of the one or more injectors delivers the process gas at a downstream location from the inductively coupled plasma source.

5. The plasma processing apparatus of claim 1, wherein at least one injector of the one or more injectors is angled upward relative to the workpiece.

6. The plasma processing apparatus of claim 1, wherein the gas supply comprises at least one gas manifold, the at least one gas manifold comprising the one or more injectors.

7. The plasma processing apparatus of claim 1, wherein the one or more injectors are angled in a clockwise direction to produce a clockwise gas flow relative to the direction perpendicular to the center of the workpiece.

8. The plasma processing apparatus of claim 7, wherein an angle between each injector of the one or more injectors and the direction parallel to the radius of the workpiece is no more than about 60 degrees.

9. The plasma processing apparatus of claim 1, wherein the one or more injectors are angled in a counter-clockwise direction to produce a counter-clockwise gas flow relative to the direction perpendicular to the center of the workpiece.

10. The plasma processing apparatus of claim 9, wherein an angle between each injector of the one or more injectors and the direction parallel to the radius of the workpiece is no more than about 60 degrees.

11. A method of processing a workpiece, comprising:

placing the workpiece on a workpiece support in a processing chamber; admitting, via a gas supply, a process gas into the processing chamber; generating a plasma in the process gas in the processing chamber;

exposing the workpiece to one or more species generated by the plasma; wherein the gas supply comprises one or more injectors, each injector of the one or more injectors is angled relative to a direction parallel to a radius of the workpiece to produce a rotational gas flow relative to a direction perpendicular to a center of the workpiece.

12. The method of claim 11, wherein the gas supply is integrated with a ceiling of the processing chamber such that the gas supply delivers the process gas into the processing chamber from a top of the processing chamber.

13. The method of claim 11, wherein the gas supply is integrated with a side wall of the processing chamber.

14. The method of claim 13, wherein at least one injector of the one or more injectors delivers the process gas at a downstream location from a plasma source inducing the plasma.

15. The method of claim 11, wherein at least one injector of the one or more injectors is angled upward relative to the workpiece.

16. The method of claim 11, wherein the gas supply comprises at least one gas manifold, the at least one gas manifold comprising the one or more injectors.

17. The method of claim 11, wherein the one or more injectors are angled in a clockwise direction to produce a clockwise gas flow relative to the direction perpendicular to the center of the workpiece.

18. The method of claim 11, wherein an angle between each injector of the one or more injectors and the direction parallel to the radius of the workpiece is no more than about 60 degrees.

19. The method of claim 11, wherein the one or more injectors are angled in a counter-clockwise direction to produce a counter-clockwise gas flow relative to the direction perpendicular to the center of the workpiece.

20. The method of claim 11, wherein an angle between each injector of the one or more injectors and the direction parallel to the radius of the workpiece is no more than about 60 degrees.