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1. WO2016100393 - SOURCE DE LUMIÈRE À BASE DE PLASMA


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INTERNATIONAL SEARCH REPORT (ISR)
Part 1:  1  2  3  4  5  6          Part 2:  A  B  C  D  E 
International application No. Applicant's or agent's file reference
PCT/US2015/065896 P4570-PCT
International filing date (day/month/year) (Earliest) Priority Date (day/month/year)
15 December 2015 16 December 2014
Applicant
KLA-TENCOR CORPORATION
FOR FURTHER ACTION: See Form PCT/ISA/220 as well as, where applicable, item 5 below.
This international search report has been prepared by this International Searching Authority and is transmitted to the applicant according to Article 18. A copy is being transmitted to the International Bureau.
It is also accompanied by a copy of each prior art document cited in this report.
1. Basis of the report
a. With regard to the language, the international search was carried out on the basis of:
the international application in the language in which it was filed.
a translation of the international application into                                          which is the language of a translation furnished for the purposes of international search (Rules 12.3(a) and 23.1(b)).
b.
This international search report has been established taking into account the rectification of an obvious mistake authorized by or notified to this Authority under Rule 91 (Rule 43.6bis(a)).
c.
With regard to any nucleotide and/or amino acid sequence disclosed in the international application, the international search was carried out on the basis of a sequence listing:
2. Certain claims were found unsearchable
3. Unity of invention is lacking
4. Title of the invention
The text is approved as submitted by the applicant.
The text has been established by this Authority to read as follows:
5. Abstract
The text is approved as submitted by the applicant.
The text has been established, according to Rule 38.2, by this Authority as it appears in Box No. IV. The applicant may, within one month from the date of mailing of this international search report, submit comments to this Authority.
6. Drawings
a.
The figure of the drawings to be published with the abstract is Figure No.     1    
as suggested by the applicant.
as selected by this Authority, because the applicant failed to suggest a figure.
as selected by this Authority, because this figure better characterizes the invention.
b.
none of the figures is to be published with the abstract.

A. CLASSIFICATION OF SUBJECT MATTER

     H05G 2/00 (2006.01)i; G03F 7/20 (2006.01)i
According to International Patent Classification (IPC) or to both national classification and IPC

B. FIELDS SEARCHED

Minimum documentation searched (classification system followed by classification symbols):
Documentation searched other than minimum documentation to the extent that such documents are included in the fields searched:
Korean utility models and applications for utility models
Japanese utility models and applications for utility models
Electronic data base consulted during the international search (name of data base and, where practicable, search terms used):
eKOMPASS(KIPO internal) & Keywords: plasma, target material, plasma site, mirror, flowing gas, gas source, pump

C. DOCUMENTS CONSIDERED TO BE RELEVANT

Category* Citation of document, with indication, where appropriate, of the relevant passages Relevant to claim No.
(1)
X
US 2012-0305810 A1 (ALEXANDER I. ERSHOV et al.) 06 December 2012 See abstract, paragraphs [0051]-[0080], [0087]-[0092], claim 2 and figures 1, 5.
1-8,10-24,33-39,41-45
Y
9,40
A
25-32
(2)
X
US 2012-0050706 A1 (RICHARD A. LEVESQUE et al.) 01 March 2012 See paragraphs [0032]-[0048], claim 23 and figures 4, 5B.
25-32
Y
9,40
(3)
A
US 2014-0103229 A1 (CYMER, LLC) 17 April 2014 See paragraphs [0038]-[0051], claim 1 and figure 1.
1-45
(4)
A
JP 2010-537424 A (ASML NETHERLANDS B.V.) 02 December 2010 See paragraphs [0037]-[0044], claim 1 and figure 2.
1-45
(5)
A
US 2008-0210889 A1 (TAKASHI SUGANUMA et al.) 04 September 2008 See paragraphs [0038]-[0048], claim 1 and figure 1.
1-45
*
Special categories of cited documents:
"A"
document defining the general state of the art which is not considered to be of particular relevance
"D"
document cited by the applicant in the international application
"E"
earlier application or patent but published on or after the international filing date
"L"
document which may throw doubts on priority claim(s) or which is cited to establish the publication date of another citation or other special reason (as specified)
"O"
document referring to an oral disclosure, use, exhibition or other means
"P"
document published prior to the international filing date but later than the priority date claimed
"T"
later document published after the international filing date or priority date and not in conflict with the application but cited to understand the principle or theory underlying the invention
"X"
document of particular relevance; the claimed invention cannot be considered novel or cannot be considered to involve an inventive step when the document is taken alone
"Y"
document of particular relevance; the claimed invention cannot be considered to involve an inventive step when the document is combined with one or more other such documents, such combination being obvious to a person skilled in the art
"&"
document member of the same patent family

D. INFORMATION ON PATENT FAMILY MEMBERS

Patent document cited in search report Publication date
(day/month/year)
Patent family member(s) Publication date
(day/month/year)
US 2012-0305810 A1
06 December 2012
CN 101790764 A
CN 101790764 B
EP 2181448 A1
EP 2181448 A4
JP 2010-538420 A
JP 5552051 B2
KR 10-1503894 B1
KR 10-2010-0057851 A
TW 200922386 A
US 2009-057567 A1
US 2010-140514 A1
US 7655925 B2
US 8198615 B2
US 8785892 B2
WO 2009-032054 A1
28 July 2010
23 January 2013
05 May 2010
08 February 2012
09 December 2010
16 July 2014
19 March 2015
01 June 2010
16 May 2009
05 March 2009
10 June 2010
02 February 2010
12 June 2012
22 July 2014
12 March 2009
US 2012-0050706 A1
01 March 2012
DE 102011111462 A1
JP 2012-054551 A
NL 2007265 A
NL 2007265 C
01 March 2012
15 March 2012
01 March 2012
06 November 2013
US 2014-0103229 A1
17 April 2014
JP 2012-523666 A
JP 2012-523693 A
JP 2012-523694 A
JP 5684786 B2
JP 5695636 B2
JP 5739411 B2
KR 10-2012-0005501 A
KR 10-2012-0005506 A
KR 10-2012-0006046 A
TW 201101939 A
TW 201127214 A
TW 201127215 A
TW 201524272 A
TW I469690 B
TW I481315 B
US 2010-258748 A1
US 2010-258749 A1
US 2010-258750 A1
US 2014-048099 A1
US 8138487 B2
US 8575575 B2
US 8653491 B2
US 8847183 B2
US 9119278 B2
WO 2010-117858 A1
WO 2010-117859 A1
WO 2010-117861 A1
04 October 2012
04 October 2012
04 October 2012
18 March 2015
08 April 2015
24 June 2015
16 January 2012
16 January 2012
17 January 2012
01 January 2011
01 August 2011
01 August 2011
16 June 2015
11 January 2015
11 April 2015
14 October 2010
14 October 2010
14 October 2010
20 February 2014
20 March 2012
05 November 2013
18 February 2014
30 September 2014
25 August 2015
14 October 2010
14 October 2010
14 October 2010
JP 2010-537424 A
02 December 2010
CN 101785368 A
CN 101785368 B
CN 101785369 A
EP 2191698 A2
EP 2191698 B1
JP 2010-537377 A
JP 2010-537424 T
JP 5191541 B2
JP 5659015 B2
KR 10-1495208 B1
KR 10-1528581 B1
KR 10-2010-0063082 A
TW 200919112 A
TW I448828 B
US 2009-0250639 A1
US 2010-0253928 A1
US 7763871 B2
US 8242473 B2
WO 2009-024860 A2
WO 2009-024860 A3
WO 2009-025557 A1
21 July 2010
02 January 2013
21 July 2010
02 June 2010
03 October 2012
02 December 2010
02 December 2010
08 May 2013
28 January 2015
25 February 2015
12 June 2015
10 June 2010
01 May 2009
11 August 2014
08 October 2009
07 October 2010
27 July 2010
14 August 2012
26 February 2009
16 April 2009
26 February 2009
US 2008-0210889 A1
04 September 2008
JP 2008-218600 A
JP 5086664 B2
US 7880153 B2
18 September 2008
28 November 2012
01 February 2011
Name and mailing address of the ISA/:
Korean Intellectual Property Office
189 Cheongsa-ro, Seo-gu, Daejeon Metropolitan City, 302-701
Republic of Korea
Facsimile No. +82-42-481-8578
Date of the actual completion of the international search:
29 April 2016
Date of mailing of the international search report:
04 May 2016
Authorized officer:
CHO, KI YUN
Telephone No. +82-42-481-5655
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