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1. US20080163096 - METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS

Office United States of America
Application Number 11877264
Application Date 23.10.2007
Publication Number 20080163096
Publication Date 03.07.2008
Publication Kind A1
IPC
G06F 3/048
GPHYSICS
06COMPUTING; CALCULATING OR COUNTING
FELECTRIC DIGITAL DATA PROCESSING
3Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
01Input arrangements or combined input and output arrangements for interaction between user and computer
048Interaction techniques based on graphical user interfaces
Applicants PANNESE PATRICK D
KAVATHEKAR VINAYA
VAN DER MEULEN PETER
Inventors Pannese Patrick D.
Kavathekar Vinaya
van der Meulen Peter
Agents STRATEGIC PATENTS P.C..
Priority Data 10985834 10.11.2004 US
11123966 06.05.2005 US
11302563 13.12.2005 US
60518823 10.11.2003 US
60607649 07.09.2004 US
Title
(EN) METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS
Abstract
(EN)

Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.