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1. KR1020170097781 - 탄성파 장치 및 그 제조 방법

Office Republic of Korea
Application Number 1020177020923
Application Date 09.03.2016
Publication Number 1020170097781
Publication Date 28.08.2017
Grant Number 1019235730000
Grant Date 29.11.2018
Publication Kind B1
IPC
H03H 9/25
HELECTRICITY
03BASIC ELECTRONIC CIRCUITRY
HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
9Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
25Constructional features of resonators using surface acoustic waves
H03H 3/02
HELECTRICITY
03BASIC ELECTRONIC CIRCUITRY
HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
3Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
007for the manufacture of electromechanical resonators or networks
02for the manufacture of piezo-electric or electrostrictive resonators or networks
H03H 3/08
HELECTRICITY
03BASIC ELECTRONIC CIRCUITRY
HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
3Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
007for the manufacture of electromechanical resonators or networks
08for the manufacture of resonators or networks using surface acoustic waves
H03H 9/145
HELECTRICITY
03BASIC ELECTRONIC CIRCUITRY
HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
9Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
02Details
125Driving means, e.g. electrodes, coils
145for networks using surface acoustic waves
H03H 9/17
HELECTRICITY
03BASIC ELECTRONIC CIRCUITRY
HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
9Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
15Constructional features of resonators consisting of piezo-electric or electrostrictive material
17having a single resonator
Applicants 가부시키가이샤 무라타 세이사쿠쇼
Inventors 키시모토 유타카
Agents 윤앤리특허법인(유한)
Priority Data JP-P-2015-051816 16.03.2015 JP
Title
(KO) 탄성파 장치 및 그 제조 방법
Abstract
(KO)
다이싱 공정 시에 층간의 박리가 생기기 어려운 탄성파 장치 및 그 제조 방법을 제공한다. 탄성파 장치(1)는, 제1 주면(2a)과, 상기 제1 주면(2a)에 대향하고 있는 제2 주면(2b)을 가지는 압전체층(2)과, 압전체층(2)의 제1 주면(2a) 상에 적층되어 있는 음향 반사층(5)과, 압전체층(2)에 마련되어 있는 여진전극과, 지지층(6)을 포함한다. 음향 반사층(5)은, 압전체층(2)의 제2 주면(2b)에 수직인 방향으로 봤을 때, 적어도 여진전극과 겹치도록 위치하고 있다. 지지층(6)은, 적어도, 압전체층(2)의 제2 주면(2b)에 수직인 방향으로 봤을 때, 음향 반사층(5)을 둘러싸도록 마련되어 있다.

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