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1. KR1020110055399 - METHOD OF MANUFACTURING A BASIC MATERIAL FOR A MULTI-COMPONENT ALLOY BASED SPUTTERING TARGET AND A MULTI-FUNCTIONAL COMPOSITE COATING THIN-FILM, ENABLING A FILM TO BE FORMED WITHOUT THE DIFFERENCE OF SPUTTERING YIELD BETWEEN COMPONENTS

Office Republic of Korea
Application Number 1020100111197
Application Date 09.11.2010
Publication Number 1020110055399
Publication Date 25.05.2011
Publication Kind A
IPC
C23C 14/34
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22characterised by the process of coating
34Sputtering
C23C 14/06
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
06characterised by the coating material
B22F 9/08
BPERFORMING OPERATIONS; TRANSPORTING
22CASTING; POWDER METALLURGY
FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
9Making metallic powder or suspensions thereof; Apparatus or devices specially adapted therefor
02using physical processes
06starting from liquid material
08by casting, e.g. through sieves or in water, by atomising or spraying
CPC
C23C 14/0036
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
0021Reactive sputtering or evaporation
0036Reactive sputtering
B22D 7/005
BPERFORMING OPERATIONS; TRANSPORTING
22CASTING; POWDER METALLURGY
DCASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
7Casting ingots, ; e.g. from ferrous metals
005from non-ferrous metals
B22D 21/00
BPERFORMING OPERATIONS; TRANSPORTING
22CASTING; POWDER METALLURGY
DCASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
21Casting non-ferrous metals or metallic compounds so far as their metallurgical properties are of importance for the casting procedure; Selection of compositions therefor
B22F2998/10
BPERFORMING OPERATIONS; TRANSPORTING
22CASTING; POWDER METALLURGY
FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER
2998Supplementary information concerning processes or compositions relating to powder metallurgy
10Processes characterised by the sequence of their steps
C22C 1/045
CCHEMISTRY; METALLURGY
22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
CALLOYS
1Making alloys
04by powder metallurgy
045Alloys based on refractory metals
C22C 16/00
CCHEMISTRY; METALLURGY
22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
CALLOYS
16Alloys based on zirconium
Applicants KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY
한국생산기술연구원
Inventors SHIN, SEUNG YONG
신승용
MOON, KYOUNG IL
문경일
SUN, JU HYUN
선주현
LEE, CHANG HUN
이장훈
BAE, JUNG CHAN
배정찬
Agents 특허법인다인
Priority Data 1020090112258 19.11.2009 KR
Title
(EN) METHOD OF MANUFACTURING A BASIC MATERIAL FOR A MULTI-COMPONENT ALLOY BASED SPUTTERING TARGET AND A MULTI-FUNCTIONAL COMPOSITE COATING THIN-FILM, ENABLING A FILM TO BE FORMED WITHOUT THE DIFFERENCE OF SPUTTERING YIELD BETWEEN COMPONENTS
(KO) 다성분 합금계 스퍼터링 타겟 모물질 및 다기능성 복합코팅 박막 제조방법
Abstract
(EN)
PURPOSE: A method of manufacturing a basic material for a multi-component alloy based sputtering target and a multi-functional composite coating thin-film is provided to enable a film with low friction and high hardness to be formed since active metal nitride and soft metal are mixed through a selective reactive sputtering process. CONSTITUTION: A method of manufacturing a basic material for a multi-component alloy based sputtering target and a multi-functional composite coating thin-film comprise next steps. A multi-component alloy target is manufactured based on bulk amorphous alloy. A nano structure of hard thin film with high hardness, low elasticity and low friction is manufactured through a reactive sputtering process using mixed gas of N and Ar. COPYRIGHT KIPO 2011

(KO)
본 발명은 다성분 합금계 스퍼터링 타겟 모물질 및 다기능성 복합코팅 박막 제조방법에 관한 것으로, 구체적으로 마찰환경에서 사용되는 구동소재 부품 또는 공구부품의 표면에 고경도 특성뿐만 아니라 및 저마찰의 기능을 갖는 보호 박막을 스퍼터링공정에 의해 성막하는 것을 목적으로 활성금속과 연질금속으로 구성하는 것을 특징으로 하고, 3개 이상의 성분원소를 포함하고, 특히 비정질구조를 갖는 단일합금타겟을 제조하는 방법과 이를 이용한 선택적 반응성 스퍼터링을 통한 다기능성 나노박막 성막공정기술을 제공한다.