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1. (JP2017071505) 容器の搬送システム

Office : Japan
Application Number: 2015201590 Application Date: 09.10.2015
Publication Number: 2017071505 Publication Date: 13.04.2017
Grant Number: 6549013 Grant Date: 05.07.2019
Publication Kind : B2
IPC:
C23C 16/44
B65G 47/90
C23C 14/50
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
16
Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (CVD) processes
44
characterised by the method of coating
B PERFORMING OPERATIONS; TRANSPORTING
65
CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
G
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
47
Article or material-handling devices associated with conveyers; Methods employing such devices
74
Feeding, transfer, or discharging devices of particular kinds or types
90
Devices for picking-up and depositing articles or materials
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
50
Substrate holders
Applicants: キリン株式会社
Inventors: 藤本 圭一
田渕 博康
Agents: 山本 晃司
岸本 達人
Priority Data:
Title: (JA) 容器の搬送システム
Abstract:
(JA)

【課題】成膜装置の処理チャンバに対するメインテナンス性の低下を抑制できる容器の搬送システムを提供する。
【解決手段】搬送システム1は、成膜装置2による成膜処理前のペットボトルPBを搬送する供給コンベア5と、成膜処理後のペットボトルPBを搬送する排出コンベア6と、供給コンベア5にて搬送されたペットボトルPBを、処理チャンバ3の供給排出機構3aに移送する供給ロボット7と、成膜処理後に処理チャンバ3から供給排出機構3aが排出したペットボトルPBを、排出コンベア6に移送する排出ロボット8と、を備え、処理チャンバ3の一方の側に供給ロボット7が、処理チャンバの他方の側に排出ロボット8がそれぞれ配置され、かつ、供給ロボット7が配置された側に、供給コンベア5と排出コンベア6とが並列に配置されている。
【選択図】図1