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1. (JP2014184357) NOZZLE CLEANING UNIT AND NOZZLE CLEANING METHOD

Office : Japan
Application Number: 2013059141 Application Date: 21.03.2013
Publication Number: 2014184357 Publication Date: 02.10.2014
Publication Kind : A
IPC:
B08B 5/02
B08B 3/04
B08B 9/02
B05C 5/00
H01L 21/027
B PERFORMING OPERATIONS; TRANSPORTING
08
CLEANING
B
CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
5
Cleaning by methods involving the use of air flow or gas flow
02
Cleaning by the force of jets, e.g. blowing-out cavities
B PERFORMING OPERATIONS; TRANSPORTING
08
CLEANING
B
CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
3
Cleaning by methods involving the use or presence of liquid or steam
04
Cleaning involving contact with liquid
B PERFORMING OPERATIONS; TRANSPORTING
08
CLEANING
B
CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
9
Cleaning hollow articles by methods or apparatus specially adapted thereto
02
Cleaning pipes or tubes or systems of pipes or tubes
B PERFORMING OPERATIONS; TRANSPORTING
05
SPRAYING OR ATOMISING IN GENERAL; APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
C
APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
5
Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
02
Manufacture or treatment of semiconductor devices or of parts thereof
027
Making masks on semiconductor bodies for further photolithographic processing, not provided for in group H01L21/18 or H01L21/34165
Applicants: TOSHIBA CORP
株式会社東芝
Inventors: OSHIRO KENICHI
大城 健一
SATO TSUYOSHI
佐藤 強
KOBAYASHI HIROAKI
小林 浩秋
Agents: 日向寺 雅彦
Priority Data:
Title: (EN) NOZZLE CLEANING UNIT AND NOZZLE CLEANING METHOD
(JA) ノズル洗浄ユニット、およびノズル洗浄方法
Abstract: front page image
(EN)

PROBLEM TO BE SOLVED: To provide a nozzle cleaning unit and a nozzle cleaning method capable of effectively removing adherence objects adhered on a nozzle.

SOLUTION: A nozzle cleaning unit includes a cleaning nozzle part having a first injection hole annularly opening on an inner wall face of a hole into which a nozzle is inserted, a gas supply part supplying gas to the first injection hole, and a decompression part decompressing atmosphere within the hole into which the nozzle is inserted, in a side opposite to a side where the nozzle is inserted across an installation position of the first injection hole.

COPYRIGHT: (C)2015,JPO&INPIT


(JA)

【課題】ノズルに付着した付着物を効果的に除去することができるノズル洗浄ユニット、およびノズル洗浄方法を提供することである。
【解決手段】実施形態に係るノズル洗浄ユニットは、ノズルが挿入される孔の内壁面に円環状に開口した第1の噴射孔を有する洗浄ノズル部と、前記第1の噴射孔に気体を供給する気体供給部と、前記第1の噴射孔が設けられた位置を挟んで、前記ノズルが挿入される側とは反対側の前記ノズルが挿入される孔の雰囲気を減圧する減圧部と、を備えている。
【選択図】図1