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1. EP3231003 - A DEVICE HAVING TWO END BLOCKS, AN ASSEMBLY AND A SPUTTER SYSTEM COMPRISING SAME, AND A METHOD OF PROVIDING RF POWER TO A TARGET ASSEMBLY USING SAID DEVICE OR ASSEMBLY

Office European Patent Office
Application Number 15807874
Application Date 08.12.2015
Publication Number 3231003
Publication Date 18.10.2017
Publication Kind A1
IPC
H01J 37/32
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes
H01J 37/34
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes
34operating with cathodic sputtering
CPC
H01J 37/3405
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes, ; e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
34operating with cathodic sputtering
3402using supplementary magnetic fields
3405Magnetron sputtering
H01J 37/32
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes, ; e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
H01J 37/32082
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes, ; e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
32009Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
32082Radio frequency generated discharge
H01J 37/3435
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes, ; e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
34operating with cathodic sputtering
3411Constructional aspects of the reactor
3435Target holders (includes backing plates and endblocks)
H01J 37/3444
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes, ; e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
34operating with cathodic sputtering
3411Constructional aspects of the reactor
3444Associated circuits
H01J 37/347
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes, ; e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
34operating with cathodic sputtering
3464Operating strategies
347Thickness uniformity of coated layers or desired profile of target erosion
Applicants SOLERAS ADVANCED COATINGS BVBA
Inventors DE BOSSCHER WILMERT
VAN DE PUTTE IVAN
Designated States
Priority Data 14196851 08.12.2014 EP
2015079040 08.12.2015 EP
Title
(DE) VORRICHTUNG MIT ZWEI ENDBLÖCKEN, ANORDNUNG UND SPUTTERSYSTEM DAMIT UND VERFAHREN ZUR BEREITSTELLUNG VON HF-LEISTUNG AN EINE ZIELANORDNUNG MIT UNTER VERWENDUNG DER BESAGTEN VORRICHTUNG ODER ANORDNUNG
(EN) A DEVICE HAVING TWO END BLOCKS, AN ASSEMBLY AND A SPUTTER SYSTEM COMPRISING SAME, AND A METHOD OF PROVIDING RF POWER TO A TARGET ASSEMBLY USING SAID DEVICE OR ASSEMBLY
(FR) DISPOSITIF COMPRENANT DEUX BLOCS D'EXTRÉMITÉ, ENSEMBLE ET SYSTÈME DE PULVÉRISATION CATHODIQUE COMPRENANT CELUI-CI, ET PROCÉDÉ DE FOURNITURE DE PUISSANCE RADIOÉLECTRIQUE À UN ENSEMBLE CIBLE À L'AIDE DUDIT DISPOSITIF OU ENSEMBLE
Abstract