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1. (EP1935027) SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

Office : European Patent Office
Application Number: 06798504 Application Date: 03.10.2006
Publication Number: 1935027 Publication Date: 25.06.2008
Publication Kind : B1
Designated States: DE, FI, FR, GB, NL
Prior PCT appl.: Application Number:JP2006320154 ; Publication Number: Click to see the data
IPC:
H01L 29/786
H01L 51/00
H01L 51/10
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
29
Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having at least one potential-jump barrier or surface barrier; Capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof
66
Types of semiconductor device
68
controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified, or switched
76
Unipolar devices
772
Field-effect transistors
78
with field effect produced by an insulated gate
786
Thin-film transistors
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
51
Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
51
Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof
05
specially adapted for rectifying, amplifying, oscillating or switching and having at least one potential-jump barrier or surface barrier; Capacitors or resistors with at least one potential-jump barrier or surface barrier
10
Details of devices
CPC:
H01L 29/7869
H01L 29/41733
H01L 51/0097
H01L 51/105
H01L 2251/5338
Y02E 10/549
Y02P 70/521
Applicants: SEMICONDUCTOR ENERGY LAB
Inventors: HONDA TATSUYA
Priority Data: 2005300825 14.10.2005 JP
2006320154 03.10.2006 JP
Title: (DE) HALBLEITERBAUELEMENT UND HERSTELLUNGSVERFAHREN DAFÜR
(EN) SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
(FR) DISPOSITIF A SEMI-CONDUCTEURS ET SON PROCEDE DE FABRICATION
Abstract: front page image
(EN) An object is to obtain a semiconductor device with improved characteristics by reducing contact resistance of a semiconductor film with electrodes or wirings, and improving coverage of the semiconductor film and the electrodes or wirings. The present invention relates to a semiconductor device including a gate electrode over a substrate, a gate insulating film over the gate electrode, a first source or drain electrode over the gate insulating film, an island-shaped semiconductor film over the first source or drain electrode, and a second source or drain electrode over the island-shaped semiconductor film and the first source or drain electrode. Further, the second source or drain electrode is in contact with the first source or drain electrode, and the island-shaped semiconductor film is sandwiched between the first source or drain electrode and the second source or drain electrode. Moreover, the present invention relates to a manufacturing method of the semiconductor device.
(FR) La présente invention concerne un objet pour obtenir un dispositif à semi-conducteurs avec des caractéristiques améliorées en réduisant la résistance de contact d'un film à semi-conducteurs avec des électrodes ou des câblages et en améliorant la couverture du film à semi-conducteurs et les électrodes ou les câblages. La présente invention concerne un dispositif à semi-conducteurs comprenant une électrode de grille sur un substrat, un film d'isolation de grille sur l'électrode de grille, une première électrode source ou drain sur le film d'isolation de grille, un film à semi-conducteurs en forme d'îlot sur la première électrode source ou drain, et une seconde électrode source ou drain sur le film à semi-conducteurs en forme d'îlot et la première électrode source ou drain. De plus, la seconde électrode source ou drain est en contact avec la première et le film à semi-conducteurs en forme d'îlot est enserré entre la première et la seconde électrode source ou drain. De plus, la présente invention a trait à un procédé de fabrication du dispositif à semi-conducteurs.
Also published as:
JP2007134687US20070087487JP2013016861CN101278403JP2014103418JP2015144312
WO/2007/043493