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1. CN109696570 - Detecting device and method for microscopic electrical property of friction interface

Office
China
Application Number 201711002795.X
Application Date 24.10.2017
Publication Number 109696570
Publication Date 30.04.2019
Grant Number 109696570
Grant Date 10.03.2020
Publication Kind B
IPC
G01R 1/073
GPHYSICS
01MEASURING; TESTING
RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
1Details of instruments or arrangements of the types covered by groups G01R5/-G01R13/122
02General constructional details
06Measuring leads; Measuring probes
067Measuring probes
073Multiple probes
G01R 31/00
GPHYSICS
01MEASURING; TESTING
RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
31Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
CPC
G01R 1/073
GPHYSICS
01MEASURING; TESTING
RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
1Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
02General constructional details
06Measuring leads; Measuring probes
067Measuring probes
073Multiple probes
G01R 31/00
GPHYSICS
01MEASURING; TESTING
RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
31Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
Applicants TSINGHUA UNIVERSITY
清华大学
Inventors GU YANQI
谷炎琦
LYU YAN
吕焱
MA TIANBAO
马天宝
XIE GUOXIN
解国新
LUO JIANBIN
雒建斌
Agents 北京华进京联知识产权代理有限公司 11606
Title
(EN) Detecting device and method for microscopic electrical property of friction interface
(ZH) 摩擦界面微观电性的探测装置及方法
Abstract
(EN)
The invention relates to a detecting device for the microscopic electrical property of a friction interface. The detecting device comprises a friction member and a detection member. The friction member is used for realizing friction with the surface of a to-be-detected sample; the detection member being opposite to the friction member includes at least one probe array and is used for detecting thefriction surface between the friction member and the to-be-detected sample. According to the invention, detection is carried out without moving the detection member. With the detecting device and method, multi-point and large-area measurement is realized simultaneously; the time spent in the measurement is short; and the measuring efficiency is high.

(ZH)
本发明涉及一种摩擦界面微观电性的探测装置,包括摩擦构件与探测部件,所述摩擦构件用于与待测样品表面进行摩擦;所述探测部件与所述摩擦构件相对设置,所述探测部件包括至少一个探针阵列,用于对所述摩擦构件与所述待测样品之间的摩擦表面进行探测。本发明提供的摩擦界面微观电性的探测装置,无需移动探测部件便可进行探测,此探测装置及方法同时实现了多点,大面积的测量,在测量过程中所用时间短,测量效率高。