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1. (CN107030061) Probe washing device and probe washing method

Office : China
Application Number: 201710227576.5 Application Date: 06.04.2017
Publication Number: 107030061 Publication Date: 11.08.2017
Grant Number: 107030061 Grant Date: 23.07.2019
Publication Kind : B
IPC:
B08B 3/12
F26B 21/00
B PERFORMING OPERATIONS; TRANSPORTING
08
CLEANING
B
CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
3
Cleaning by methods involving the use or presence of liquid or steam
04
Cleaning involving contact with liquid
10
with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity, by vibration
12
by sonic or ultrasonic vibrations
F MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
26
DRYING
B
DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
21
Arrangements for supplying or controlling air or gases for drying solid materials or objects
Applicants: WUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
武汉华星光电技术有限公司
Inventors: LIU JIE
刘杰
Agents: 广州三环专利商标代理有限公司 44202
广州三环专利商标代理有限公司 44202
Priority Data:
Title: (EN) Probe washing device and probe washing method
(ZH) 探针清洗装置及探针清洗方法
Abstract: front page image
(EN) The invention discloses a probe washing device. The probe washing device comprises a washing tank, an ultrasonic generator and a control module. The control module is electrically connected with the ultrasonic generator. The washing tank contains a washing agent and is arranged on one side of a working platform of a surface segment difference measuring device. The ultrasonic generator is arranged in the washing tank. The control module controls the ultrasonic generator to drive the washing agent to vibrate at the ultrasonic frequency so as to wash a probe, and meanwhile the control module controls the depth of the part, stretching into the liquid face of the washing agent, of the probe. The invention further discloses a probe washing method. The probe washing device is arranged beside the working platform and can periodically wash the probe without shutdown, the situation that the probe surface is contaminated with blots or residues, and the measuring precision is affected is avoided, the ultrasonic washing effect is good and stable, the situation that the probe measuring precision is affected by abnormities such as probe inclining cannot occur, the probe is protected against damage, and the service life of the probe is prolonged.
(ZH) 本发明公布了一种探针清洗装置,探针清洗装置包括清洗槽、超声波发生器及控制模组,控制模组电连接超声波发生器,清洗槽盛放清洗剂并安装于表面段差测量装置的工作平台一侧,超声波发生器置于清洗槽中,控制模组控制超声波发生器带动清洗剂在超声波频率下振动以清洗探针,同时控制模组控制探针伸入清洗剂液面的深度。本发明还公布了一种探针清洗方法。在工作平台旁设置探针清洗装置可以在不停机的情况下定期清洗探针,避免探针表面沾有污渍或残渣影响测量的精确度,超声波清洗效果良好且稳定,不会出现探针倾斜等异常影响探针测量精度,保护探针不受损坏,延长探针使用寿命。