Processing

Please wait...

Settings

Settings

Goto Application

1. WO2022249444 - WAVELENGTH MEASURING APPARATUS, LINE-NARROWING LASER APPARATUS, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE

Publication Number WO/2022/249444
Publication Date 01.12.2022
International Application No. PCT/JP2021/020383
International Filing Date 28.05.2021
IPC
H01S 3/00 2006.1
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
3Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
H01S 3/10 2006.1
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
3Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
G01J 3/26 2006.1
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
12Generating the spectrum; Monochromators
26using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filter
CPC
G01J 3/26
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
12Generating the spectrum; Monochromators
26using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
H01S 3/00
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
3Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
H01S 3/10
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
3Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
Applicants
  • ギガフォトン株式会社 GIGAPHOTON INC. [JP]/[JP]
Inventors
  • 山中 琢磨 YAMANAKA Takuma
Agents
  • 保坂 延寿 HOSAKA Nobuhisa
Priority Data
Publication Language Japanese (ja)
Filing Language Japanese (JA)
Designated States
Title
(EN) WAVELENGTH MEASURING APPARATUS, LINE-NARROWING LASER APPARATUS, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE
(FR) APPAREIL DE MESURE DE LONGUEUR D'ONDE, APPAREIL LASER À RÉTRÉCISSEMENT DE LIGNE ET PROCÉDÉ DE FABRICATION DE DISPOSITIF ÉLECTRONIQUE
(JA) 波長計測装置、狭帯域化レーザ装置、及び電子デバイスの製造方法
Abstract
(EN) This wavelength measuring apparatus comprises: a first spectroscope that has a first free spectral range and that generates a first measured waveform from the interference pattern of pulse laser light; a second spectroscope that has a second free spectral range narrower than the first free spectral range and that generates a second measured waveform from the interference pattern of the pulse laser light; and a processor that reads data in a first measurement range of the first spectroscope, sets a second measurement range of the second spectroscope on the basis of the data in the first measurement range, reads data in the second measurement range, and calculates the center wavelength of the pulse laser light on the basis of the data in the first measurement range and the data in the second measurement range.
(FR) Appareil de mesure de longueur d'onde comprenant : un premier spectroscope qui présente une première plage spectrale libre et qui génère une première forme d'onde mesurée à partir du motif d'interférence de lumière laser pulsée ; un second spectroscope qui présente une seconde plage spectrale libre plus étroite que la première plage spectrale libre et qui génère une seconde forme d'onde mesurée à partir du motif d'interférence de la lumière laser pulsée ; et un processeur qui lit des données dans une première plage de mesure du premier spectroscope, définit une seconde plage de mesure du second spectroscope sur la base des données dans la première plage de mesure, lit des données dans la seconde plage de mesure, et calcule la longueur d'onde centrale de la lumière laser pulsée sur la base des données dans la première plage de mesure et des données dans la seconde plage de mesure.
(JA) 波長計測装置は、第1のフリースペクトラルレンジを有し、パルスレーザ光の干渉パターンから第1の計測波形を生成する第1の分光器と、第1のフリースペクトラルレンジより小さい第2のフリースペクトラルレンジを有し、パルスレーザ光の干渉パターンから第2の計測波形を生成する第2の分光器と、第1の分光器の第1の計測範囲のデータを読み出し、第1の計測範囲のデータに基づいて第2の分光器の第2の計測範囲を設定し、第2の計測範囲のデータを読み出し、第1の計測範囲のデータ及び第2の計測範囲のデータに基づいてパルスレーザ光の中心波長を算出するプロセッサと、を備える。
Latest bibliographic data on file with the International Bureau