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1. WO2022214392 - METROLOGY SYSTEMS, MEASUREMENT OF WEAR SYSTEMS AND METHODS THEREOF

Publication Number WO/2022/214392
Publication Date 13.10.2022
International Application No. PCT/EP2022/058670
International Filing Date 31.03.2022
IPC
G01B 11/06 2006.1
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
02for measuring length, width, or thickness
06for measuring thickness
CPC
G01B 11/0625
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
02for measuring length, width or thickness
06for measuring thickness ; ; e.g. of sheet material
0616of coating
0625with measurement of absorption or reflection
Applicants
  • ASML HOLDING N.V. [NL]/[NL]
Inventors
  • CHILLARA, Venkata, Siva, Chaithanya
  • SANNA, Kellen
Agents
  • ASML NETHERLANDS B.V.
Priority Data
63/172,37208.04.2021US
Publication Language English (en)
Filing Language English (EN)
Designated States
Title
(EN) METROLOGY SYSTEMS, MEASUREMENT OF WEAR SYSTEMS AND METHODS THEREOF
(FR) SYSTÈMES DE MÉTROLOGIE, SYSTÈMES DE MESURE D'USURE ET PROCÉDÉS CORRESPONDANTS
Abstract
(EN) A method includes irradiating an object with an illumination beam, receiving, using a detector, scattered light from a first side of the object, generating a signal based on the scattered light, comparing the signal to a reference model, and determining a quantity of wear of the first side of the object based on the comparing. The first side of the object includes a layer of a coating material, and the irradiating is from a second side of the object. The scattered light includes transmitted light through the object from the second side to the first side.
(FR) L'invention concerne l'irradiation d'un objet avec un faisceau d'éclairage, la réception, à l'aide d'un détecteur, de la lumière diffusée par un premier côté de l'objet, la génération d'un signal basé sur la lumière diffusée, la comparaison du signal à un modèle de référence, et la détermination d'une quantité d'usure du premier côté de l'objet basée sur la comparaison. Le premier côté de l'objet comprend une couche d'un matériau de revêtement, et l'irradiation se fait depuis un second côté de l'objet. La lumière diffusée comprend la lumière transmise à travers l'objet du second côté au premier côté.
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