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1. WO2022163421 - METHOD AND DEVICE FOR DETECTING FOREIGN SUBSTANCE CONTAINED IN INSPECTION TARGET

Publication Number WO/2022/163421
Publication Date 04.08.2022
International Application No. PCT/JP2022/001492
International Filing Date 18.01.2022
IPC
G06T 7/00 2017.1
GPHYSICS
06COMPUTING; CALCULATING OR COUNTING
TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
7Image analysis
G06T 1/00 2006.1
GPHYSICS
06COMPUTING; CALCULATING OR COUNTING
TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
1General purpose image data processing
G06T 3/40 2006.1
GPHYSICS
06COMPUTING; CALCULATING OR COUNTING
TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
3Geometric image transformation in the plane of the image
40Scaling of a whole image or part thereof
G01N 21/27 2006.1
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
27using photo-electric detection
G01N 21/88 2006.1
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
84Systems specially adapted for particular applications
88Investigating the presence of flaws, defects or contamination
CPC
G01N 21/27
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
27using photo-electric detection
G01N 21/88
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
84Systems specially adapted for particular applications
88Investigating the presence of flaws or contamination
G06T 1/00
GPHYSICS
06COMPUTING; CALCULATING; COUNTING
TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
1General purpose image data processing
G06T 3/40
GPHYSICS
06COMPUTING; CALCULATING; COUNTING
TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
3Geometric image transformation in the plane of the image
40Scaling the whole image or part thereof
G06T 7/00
GPHYSICS
06COMPUTING; CALCULATING; COUNTING
TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
7Image analysis
Applicants
  • パナソニックIPマネジメント株式会社 PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD. [JP]/[JP]
Inventors
  • 西尾 和晃 NISHIO Kazuaki
Agents
  • 鎌田 健司 KAMATA Kenji
  • 野村 幸一 NOMURA Koichi
Priority Data
2021-01038626.01.2021JP
Publication Language Japanese (ja)
Filing Language Japanese (JA)
Designated States
Title
(EN) METHOD AND DEVICE FOR DETECTING FOREIGN SUBSTANCE CONTAINED IN INSPECTION TARGET
(FR) PROCÉDÉ ET DISPOSITIF DE DÉTECTION D'UNE SUBSTANCE ÉTRANGÈRE CONTENUE DANS UNE CIBLE D'INSPECTION
(JA) 検査対象に含まれる異物を検出する方法および装置
Abstract
(EN) This method for detecting a specific foreign substance contained in an inspection target includes: acquiring first image data of the inspection target, the first image data having pixels each having a pixel value of a first band group including one or more wavelength bands (S110, S210); determining, using the first image data, one or more pixel regions satisfying a first condition as a first foreign substance region (S120, S230); acquiring second image data of a region including the first foreign substance region, the second image data having pixels each having a pixel value of a second band group including more wavelength bands than the first band group (S152, S260); determining, using the second image data, one or more pixel regions satisfying a second condition different from the first condition as a second foreign substance region where the specific foreign substance exists (S154, S270); and outputting information about the second foreign substance region (S180, S300).
(FR) La présente invention concerne un procédé de détection d'une substance étrangère spécifique contenue dans une cible d'inspection qui consiste à : acquérir des premières données d'image de la cible d'inspection, les premières données d'image ayant des pixels ayant chacun une valeur de pixel d'un premier groupe de bandes comprenant une ou plusieurs bandes de longueur d'onde (S110, S210) ; déterminer, à l'aide des premières données d'image, une ou plusieurs régions de pixel satisfaisant une première condition en tant que première région de substance étrangère (S120, S230) ; acquérir des secondes données d'image d'une région comprenant la première région de substance étrangère, les secondes données d'image ayant des pixels ayant chacun une valeur de pixel d'un second groupe de bandes comprenant davantage de bandes de longueur d'onde que le premier groupe de bandes (S152, S260) ; déterminer, à l'aide des secondes données d'image, une ou plusieurs régions de pixel satisfaisant une seconde condition différente de la première condition en tant que seconde région de substance étrangère où existe la substance étrangère spécifique (S154, S270) ; et délivrer des informations concernant la seconde région de substance étrangère (S180, S300).
(JA) 検査対象に含まれる特定の異物を検出する方法は、各画素が、1つ以上の波長バンドを含む第1バンド群についての画素値を有する、前記検査対象についての第1画像データを取得すること(S110、S210)と、前記第1画像データから、第1条件を満たす1つ以上の画素領域を第1異物領域として決定すること(S120、S230)と、各画素が、前記第1バンド群よりも多くの波長バンドを含む第2バンド群についての画素値を有する、前記第1異物領域を含む領域についての第2画像データを取得すること(S152、S260)と、前記第2画像データから、前記第1条件とは異なる第2条件を満たす1つ以上の画素領域を、前記特定の異物が存在する第2異物領域として決定すること(S154、S270)と、前記第2異物領域に関する情報を出力すること(S180、S300)と、を含む。
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