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1. WO2022161906 - SURFACE ACOUSTIC WAVE RESONATOR WITH PISTON MODE DESIGN AND ELECTROSTATIC DISCHARGE PROTECTIONS

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Publication Number WO/2022/161906
Publication Date 04.08.2022
International Application No. PCT/EP2022/051466
International Filing Date 24.01.2022
IPC
H03H 9/02 2006.1
HELECTRICITY
03BASIC ELECTRONIC CIRCUITRY
HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
9Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
02Details
H03H 9/145 2006.1
HELECTRICITY
03BASIC ELECTRONIC CIRCUITRY
HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
9Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
02Details
125Driving means, e.g. electrodes, coils
145for networks using surface acoustic waves
CPC
H03H 3/08
HELECTRICITY
03BASIC ELECTRONIC CIRCUITRY
HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
3Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
007for the manufacture of electromechanical resonators or networks
08for the manufacture of resonators or networks using surface acoustic waves
H03H 9/02842
HELECTRICITY
03BASIC ELECTRONIC CIRCUITRY
HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
9Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
02Details
02535of surface acoustic wave devices
02818Means for compensation or elimination of undesirable effects
02842of reflections
H03H 9/02858
HELECTRICITY
03BASIC ELECTRONIC CIRCUITRY
HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
9Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
02Details
02535of surface acoustic wave devices
02818Means for compensation or elimination of undesirable effects
02858of wave front distortion
H03H 9/02921
HELECTRICITY
03BASIC ELECTRONIC CIRCUITRY
HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
9Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
02Details
02535of surface acoustic wave devices
02818Means for compensation or elimination of undesirable effects
02921Measures for preventing electric discharge due to pyroelectricity
H03H 9/02984
HELECTRICITY
03BASIC ELECTRONIC CIRCUITRY
HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
9Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
02Details
02535of surface acoustic wave devices
02984Protection measures against damaging
H03H 9/14532
HELECTRICITY
03BASIC ELECTRONIC CIRCUITRY
HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
9Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
02Details
125Driving means, e.g. electrodes, coils
145for networks using surface acoustic waves
14517Means for weighting
14529Distributed tap
14532Series weighting; Transverse weighting
Applicants
  • RF360 EUROPE GMBH [DE]/[DE]
Inventors
  • SCHULZ, Volker
  • JAEGER, Philipp Michael
Agents
  • BARDEHLE PAGENBERG PARTNERSCHAFT MBB PATENTANWÄLTE, RECHTSANWÄLTE
Priority Data
17/161,99929.01.2021US
Publication Language English (en)
Filing Language English (EN)
Designated States
Title
(EN) SURFACE ACOUSTIC WAVE RESONATOR WITH PISTON MODE DESIGN AND ELECTROSTATIC DISCHARGE PROTECTIONS
(FR) RÉSONATEUR À ONDES ACOUSTIQUES DE SURFACE À CONCEPTION EN MODE PISTON ET PROTECTIONS CONTRE LES DÉCHARGES ÉLECTROSTATIQUES
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Abstract
(EN) Certain aspects of the present disclosure provide a surface acoustic wave (SAW) resonator with piston mode design and electrostatic discharge (ESD) protections. An example electroacoustic device generally includes a piezoelectric material and a first electrode structure disposed above the piezoelectric material. The first electrode structure comprises first electrode fingers arranged within an active region having a first region and a second region. At least one of the first electrode fingers has at least one of a different width or a different height in the first region than in the second region, and the first electrode fingers comprise a first electrode finger that has a width or height in the second region that is less than a corresponding width or height of the at least one of the first electrode fingers in the second region.
(FR) Certains aspects de la présente divulgation concernent un résonateur à ondes acoustiques de surface (SAW) à conception en mode piston et des protections contre les décharges électrostatiques (ESD). Un exemple de dispositif électroacoustique comprend généralement un matériau piézoélectrique et une première structure d'électrode disposée au-dessus du matériau piézoélectrique. La première structure d'électrode comprend des premiers doigts d'électrode disposés à l'intérieur d'une région active ayant une première région et une deuxième région. Au moins l'un des premiers doigts d'électrode a une largeur différente ou une hauteur différente dans la première région de celle dans la deuxième région, et les premiers doigts d'électrode comprennent un premier doigt d'électrode qui a une largeur ou une hauteur dans la deuxième région qui est inférieure à une largeur ou hauteur correspondante de l'au moins un des premiers doigts d'électrode dans la deuxième région.
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